Demonstration of robust micromachined jet technology and its application to realistic flow control problems

Journal of Mechanical Science and Technology

Volumn 20, Issue 4, 2006, Pages 554-560

  Chang, Sung Pil ^a  

^a Inha University   (South Korea)

Author keywords

Capacitive Pressure Sensor; Lamination; MEMS; Micro Fabrication; Micro Jet

Indexed keywords

EID: 33748323052     PISSN: 1738494X     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02916486     Document Type: Article

References (12)

1. Baltes, H., 1997, "CMOS Micro Electro Mechanical Systems," Sensors and Materials, Vol. 9, No. 6, pp. 331-346.
2. Coe, D. J., Allen, M. G., Trautman, M. A. and Glezer, A., 1994, "Micromachined Jets for Manipulation of Macro Flows," in Proceedings 1994 Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 243-247.
3. Glezer, A. and Amitay, M., 2002, "Synthetic Jets," Annu. Rev. Fluid Mech., Vol. 34, pp. 503-529.
4. Howe, R. T., 1994, "Applications of Silicon Micromachining to Resonator Fabrication," in Proceedings of the 1994 IEEE International Frequency Control Symposium (The 48th Ann ual Symposium) (Cat. No.94CH3446-2), pp. 2-7.
5. James, R. D., Jacob, J. W. and Glezer, A., 1996, "A Round Turbulent Jet Produced by an Oscillating Diaphragm," Journal of Physics of Fluids, Vol. 8, No. 9, pp. 2482-2495.
6. Lang, W., 1999, "Reflections on the Future of Microsystems," Sensors and Actuators, Vol. 72, pp. 1-15.
7. Li, Y. and Ming, X., 2000, "Control of Two -Dimensional Jets Using Miniature Zero Mass Flux Jets," Chinese Journal of Aeronautics, Vol. 13, No. 3, pp. 129-133.
8. Lockerby, D. A. and Carpenter, P. W., 2004, "Modeling and Design of Micro-Jet Actuators," AIAA J., Vol. 42, No. 2, pp. 220-227.
9. MacDonald, N. C., 1996, "SCREAM Microelectromechanical Systems," Microelectronics Engineering, Vol. 32, No. 1-4, pp. 49-73.
10. Mallinson, S. G., Reizes, J. A. and Hong, G., 2001, "An Experimental and Numerical Study of Synthetic Jet Flow," Aeronautical Journal, Vol. 105, pp. 41-49.
11. Mastrangelo, C. H., Zhang, X. and Tang, W. C., 1995, "Surface Micromachined Capacitive Differential Pressure sensor with Lithographically-Defined Silicon Diaphragm," in Proceedings of the International Solid-State Sensors and Ac tuators Conference-TRANSDUCERS '95, Vol. 1, 25-29, pp. 612-615.
12. Timoshenko, S., 1940, "Theory of Plates and Shells," McGraw- Hill Book Company, New York.