A port-controlled Hamiltonian approach to control of an electrostatic MEMS actuator

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 5, Issue , 2003, Pages 687-692

  Maithripala, D H S ^a   Berg, Jordan M ^a   Dayawansa, W P ^b  

^a Texas Tech University   (United States)

^b TEXAS TECH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIFURCATION (MATHEMATICS); CLOSED LOOP CONTROL SYSTEMS; DAMPING; DYNAMICS; ELECTROSTATICS; ENERGY TRANSFER; FEEDBACK; HAMILTONIANS; MICROELECTROMECHANICAL DEVICES;

DAMPING STRUCTURES; EXTERNAL INTERCONNECTION STRUCTURES;

MICROACTUATORS;

EID: 1942487799     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/imece2003-42461     Document Type: Conference Paper

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