Vertical-actuated electrostatic comb drive with in situ capacitive position correction for application in phase shifting diffraction interferometry

Journal of Microelectromechanical Systems

Volumn 12, Issue 6, 2003, Pages 960-971

  Lee, Abraham P ^a   McConaghy, Charles F ^b   Sommargren, Gary ^b   Krulevitch, Peter ^b   Campbell, Eugene W ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

Comb drive; Electrostatic; Phase shifting interferometry; Position control; Surface micromachining; Vertical levitation

Indexed keywords

AMPLIFIERS (ELECTRONIC); CAPACITORS; DIGITAL SIGNAL PROCESSING; ELECTROSTATICS; FEEDBACK CONTROL; INTERFEROMETRY; MICROMACHINING; PHASE SHIFTERS; POSITION CONTROL;

ELECTROSTATIC COMB DRIVE; IN SITU CAPACITIVE POSITION CORRECTION; PHASE SHIFTING DIFFRACTION INTERFEROMETRY; VERTICAL LEVITATION;

MICROACTUATORS;

EID: 0742319375     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.820262     Document Type: Article

References (40)

1. W. C. Tang, T.-C. H. Nguyen, M. W. Judy, and R. T. Howe, "Electrostatic-comb drive of lateral polysilicon resonators," Sens. Actuators, vol. A21-23, pp. 328-331, 1990.
2. W. Yun, "A Surface Micromachined Accelerometer With Integrated CMOS Detection Circuitry," Ph.D. dissertation, Dept. EECS, Univ. California, Berkeley, CA, 1992.
3. T. A. Roessig, R. T. Howe, A. P. Pisano, and J. H. Smith, "Surface-micromachined resonant accelerometer," in Proc. Transducers '97, International Conference on Solid-State Sensors and Actuators, vol. 2, Digest of Technical Papers, Chicago, IL, June 16-19, pp. 859-862.
4. C. Song, "Commercial vision of silicon based inertial sensors," in Transducers '97, International Conference on Solid-State Sens. Actuators, vol. 2, Digest of Technical Papers, Chicago, IL, June 16-19, 1997, Digest of Technical Papers, pp. 839-842.
5. B. E. Boser and R. T. Howe, "Surface micromachined accelerometers," IEEE J. Solid-State Circuits, vol. 31, no. 3, pp. 366-375, 1996.
6. W. A. Clark, R. T. Howe, and R. Horowitz, "Surface micromachined Z-axis vibratory rate gyroscope," in Solid-State Sensor and Actuator Workshop, vol. 2-6, Hilton Head Island, SC, June 1996, pp. 283-287.
7. A. P. Lee, "Impact Actuation of Micromechanical Structures," Ph.D. dissertation, Univ. California, Berkeley, CA, 1992.
8. L. Lin et al., "Micro electromechanical filters for signal processing," in Proc. Technical Digest, IEEE MEMS Workshop, Travemunde, Germany, Feb 4-7, 1992, pp. 226-231.
9. C. H. Hsu and R. S. Muller, "Micromechanical electrostatic voltmeter," in Transducers 91, S.F., Ca, June 24-27, 1991, pp. 659-662.
10. W. C. Tang, M. G. Lim, and R. T. Howe, "Electrostatic comb drive levitation and control method," J. Microelectromech. Syst., vol. 1, Dec. 1992.
11. G. K. Fedder and R. T. Howe, "Multimode digital control of a suspended microstructure," J. Microelectromech. Syst., vol. 5, Dec. 1996.
12. N. C. Tien, M.-H. Kiang, M. J. Daneman, O. Solgaard, K. Y. Lam, and R. S. Muller, "Actuation of polysilicon surface-micromachined mirrors," in Proc. SPIE, vol. 2687, San Jose, CA, Jan. 30-31, 1996, p. 53.
13. K. S. J. Pister, M. W. Judy, S. R. Burgett, and R. S. Fearing, "Microfabricated hinges: 1 mm vertical features with surface micromachining," in Proc. Transducers 91, San Francisco, CA, June 1991.
14. O. Solgaard, M. Daneman, N. C. Tien, A. Friedberger, R. S. Muller, and K. Y. Lau, "Optoelectronic packaging using silicon surface-micromachined alignment mirrors," IEEE Photon. Technol. Lett., vol. 7, pp. 41-43, 1995.
15. M.-H. Kiang, O. Solgaard, R. S. Muller, and K. Y. Lau, "Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners," in Proc. 1996 IEEE Microelectromechanical Systems Conference, San Diego, CA, Feb. 11, 1996.
16. ____, "Actuated polysilicon micromirrors for raster-scanning displays," in Proc. Transducers '97, International Conference on Solid-State Sensors and Actuators, vol. 2, Digest of Technical Papers, Chicago, IL, June 16-19, 1997, Digest of Technical Papers, pp. 323-326.
17. N. F. Raley, D. R. Ciarlo, J. C. Koo, B. Beiriger, J. Trujilo, C. Yu, G. Loomis, and R. Chow, "A Fabry-Perot microinterferometer for visible wavelengths," in Proc. Technical Digest of Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 1992, p. 170.
18. M.-H. Kiang, O. Solgaard, R. S. Muller, and K. Y. Lau, "Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers," IEEE Photon. Technol. Lett., vol. 8, Jan. 1996.
19. L. J. Hornbeck, "Digital light processing and MEMS: reflecting the digital display needs of networked society," in Proc. SPIE, vol. 2783, 1996, pp 2-13.
20. R. B. Apte, F. S. A. Sandejas, W. C. Banyai, and D. M. Bloom, "Deformable grating light valves for high resolution displays," in Proc. Technical Digest of Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 13-16, 1994.
21. J. H. Comtois, V. M. Bright, S. Gustafson, and M. A. Michalicek, "Implementation of hexagonal micromirror arrays as phase-mostly spatial light modulators," Proc. SPIE, vol. 2641, pp. 76-87, 1995.
22. D. Malacara, Optical Shop Testing, 2nd ed. Wiley, New York, 1992, pp. 1-94.
23. K. Creath, Interferogram Analysis, D. W. Robinson and G. T. Reid, Eds. Philadelphia, PA: Institute of Physics, 1993, pp. 97-99.
24. J. H. Bruning, D. R. Herriott, J. E. Gallagher, D. P. Rosenfeld, A. D. White, and D. J. Brangaccio, "Digital wavefront measuring interferometer for testing optical surfaces and lenses," Appl. Opt., vol. 13, no. 11, pp. 2693-2703.
25. J. Schwider, Progress in Optics, E. Wolf, Ed. New York: Elsevier Science, 1990, vol. XXVIII, pp. 296-297.
26. H. Medecki, E. Tejnil, K. A. Goldberg, and J. Bokor, "Phase-shifting point diffraction interferometer," Opt. Lett., vol. 21, no. 19, pp. 1526-1528.
27. K. S. Lau, K. H. Wong, T. L. Chan, and S. K. Yeung, "An economical piezoelectric phase modulator for fiber optic sensors," Appl. Opt., vol. 35, no. 34, pp. 6836-6838.
28. T. A. Maldonado, Handbook of Optics, 2nd ed, M. Bass, Ed. New York: McGraw-Hill, 1995, vol. II, pp. 13.17-13.18.
29. R. Crane, "New developments in interferometry-V. Interference phase measurement," Appl. Opt., vol. 8, no. 3, pp. 538-542.
30. N. A. Massie, R. D. Nelson, and S. Holly, "High-performance real-time heterodyne interferometry," Appl. Opt., vol. 17, no. 11, pp. 1797-1803.
31. H. Z. Hu, "Polarization heterodyne interferometry using a simple rotating analyzer. 1: Theory and error analysis," Appl. Opt., vol. 22, no. 13, pp. 2052-2056.
32. W. H. Stevenson, "Optical frequency shifting by means of a rotating diffraction grating," Appl. Opt., vol. 9, no. 3, pp. 649-652.
33. Y. Ishii, J. Chen, and K. Murata, "Digital phase-measuring interferometry with a tunable laser diode," Opt. Lett., vol. 12, no. 4, pp. 233-235.
34. R. G. Pilston and G. N. Steinberg, "New developments in interferometry-VII. Multiple-wavelength interferometry with tunable source," Appl. Opt., vol. 8, no. 3, pp. 553-556.
35. D. W. Phillion, "General methods for generating phase-shifting interferometry algorithms," Appl. Opt., vol. 36, no. 31, pp. 8098-8115, Nov. 1997.
36. G. E. Sommargren, "Diffraction methods raise interferometer accuracy," Laser Focus World, pp. 61-71, Aug. 1996.
37. G. Mullhern, D. Soane, and R. T. Howe, "Supercritical carbon dioxide drying of microstructures," in Transducers '93, International Conference on Solid-State Sensors and Actuators, Yokohama, Japan, June 7-10, 1993, Digest of Technical Papers, pp. 296-299.
38. M. R. Houston, R. Maboudian, and R. T. Howe, "Self-assembled monolayer films as durable antistiction coatings for poly silicon microstructures," in Technical Digest of Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 2-6, 1996, pp. 42-47.
39. A. P. Boresi and O. M. Sedibottom, Advanced Mechanics of Materials, 4th ed. New York: Wiley, 1985.
40. Y.-J. Yang, M.-A. Gretilat, and S. D. Senturia, "Effect of air damping on the dynamics of nonuniform deformations of microstructures," in Transducers '97, International Conference on Solid-State Sensors and Actuators, Digest of Technical Papers, vol 2, Digest of Technical Papers, Chicago, IL, June 16-19, 1997, p. 1093.