MEMS variable-capacitor phase shifters Part I: Loaded-line phase shifter

International Journal of RF and Microwave Computer-Aided Engineering

Volumn 13, Issue 4, 2003, Pages 321-337

  Zhang, Huantong ^a   Laws, Alexander ^a   Gupta, K C ^a   Lee, Y C ^a   Bright, Victor M ^a  

^a UNIVERSITY OF COLORADO   (United States)

Author keywords

Loaded line phase shifters; MEMS; Phase shifters; Variable capacitors

Indexed keywords

CAPACITANCE; CAPACITORS; MICROWAVE CIRCUITS; PHASE SHIFT; PHASE SHIFTERS; TUNING;

CAPACITANCE-TUNING RATIO; REFLECTION-TYPE PHASE SHIFTERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0038817785     PISSN: 10964290     EISSN: None     Source Type: Journal    
DOI: 10.1002/mmce.10089     Document Type: Article

References (35)

1. S.K. Koul and B. Bhat, Microwave and Millimeter Wave Phase Shifters, vol. II, Artech House, Boston, 1991, ch. 8, pp. 389-416.
2. G. Rebeiz, G. Tan, and J. Hayden, RF MEMS phase shifters: design and applications, IEEE Microwave Mag 3 (2002), 72-81.
3. H. Dawirs and W. Swarner, A very fast voltage controlled microwave phase shifter, Microwave J 5 (1962), 99-107.
4. J.J. Yao, RF MEMS from a device perspective, J Micromechan and Microeng 10 (2000), R9-R38.
5. G.M. Rebeiz and J.B. Muldavin, RF MEMS switches and switch circuits, IEEE Microwave Mag 2 (2001), 59-71.
6. N. Hoivik, M. A. Michalicek, Y.C. Lee, K.C. Gupta, and V.M. Bright, Digitally controllable variable high-Q MEMS capacitor for RF applications, Int Microwave Symp Dig, vol. 3, 2001, pp. 2115-2118.
7. H. Zhang, A. Laws, K.C. Gupta, Y.C. Lee, and V.M. Bright, MEMS variable-capacitor phase shifters: Part II: Reflection-type phase shifter, to be published in Int J RF and Microwave CAE.
8. D. Young and B. Boser, A micromachined variable capacitor for monolithic low-noise VCOs, IEEE Solid-state Sensor and Actuator Wkshp, 1996, pp. 86-89.
9. A. Dec and K. Suyama, Micromachined varactor with wide tuning range, Electronics Lett 33 (1997), 922-924.
10. H. Nieminen, V. Ermolov, K. Nybergh, S. Silanto, and T. Ryhänen, Micromechanical capacitors for RF applications, J Micromechan and Microeng 12 (2002), 177-186.
11. G. Ionis, A. Dec, and K. Suyama, Differential miltifinger MEMS tunable capacitors for RF integrated circuits, IEEE Int Microwave Symp Dig, 2002, pp. 345-348.
12. J.B. Rizk and G. Rebeiz, Digital-type RF MEMS switched capacitors IEEE Int Microwave Symp Dig, 2002, pp. 1217-1220.
13. Z. Feng, H. Zhang, K.C. Gupta, W. Zhang, V.M. Bright, and Y.C. Lee, MEMS-based series and shunt variable capacitors for microwave and millimeter-wave frequencies, Sensors and Actuators A: Phys 91 (2001), 256-265.
14. Z. Feng, The RF modeling of flip-chip interconnects and MEMS in microwave/millimeter wave circuits, Ph.D. dissertation, University of Colorado at Boulder, 2000.
15. L. Dussopt and G. Rebeiz, High-Q millimeter-wave MEMS varactors: Extended tuning range and discrete-position design, IEEE Int Microwave Symp Dig, 2002, pp. 1205-1208.
16. N. Hoivik, J.W. Elam, S. George, K.C. Gupta, V.M. Bright, and Y.C. Lee, Atomic layer deposition technology for reliable RF MEMS, IEEE Int Microwave Symp Dig, 2002, pp. 1229-1232.
17. M. Kim, J. Hacker, R. Mihailovich, and J. DeNatale, A DC-to-40 GHz four-bit RF MEMS true-time delay network, IEEE Microwave Wireless Components Lett 11 (2001), 56-58.
18. G.L. Tan, R. Mihailovich, J. Hacker, J. DeNatale, and G. Rebeiz, A very-low-loss 2-bit X-band RF MEMS phase shifter, IEEE Int Microwave Symp Dig, 2002, pp. 333-335.
19. C. Goldsmith, J. Randall, S. Eshelman, T.H. Lin, D. Dennis, S. Chen, and B. Norvell, Characteristics of micromachined switches at microwave frequencies, IEEE Int Microwave Symp Dig, 1996, pp. 1141-1144.
20. B. Pillans, S. Eshelman, A. Malczewski, J. Ehmke, and C. Goldsmith, Ka-band RF MEMS phase shifters, IEEE Microwave and Guided Wave Lett 9 (1999), 520-522.
21. B. Pillans, S. Eshelman, A. Malczewski, J. Ehmke, and C. Goldsmith, Ka-band RF MEMS phase shifters for phased array applications, IEEE Radio Frequency Integrated Circuits Symposium Dig, 2000, pp. 195-199.
22. A. Malczewski, S.E.B. Pillans, J. Ehmke, and C. Goldsmith, X-band RF MEMS phase shifters for phased array applications, IEEE Microwave Guided Wave Lett 9 (1999), 517-519.
23. N. Barker and G. Rebeiz, Distributed MEMS true-time delay phase shifters and wide-band switches, IEEE Trans Microwave Theory Technol 46 (1998), 1881-1890.
24. N. Barker and G. Rebeiz, Optimization of distributed MEMS transmission-line phase shifters: U-band and W-band designs, IEEE Trans Microwave Theory Technol 48 (2000), 1957-1966.
25. J. Hayden and G. Rebeiz, Low-loss cascadable MEMS distributed X-band phase shifters, IEEE Microwave and Guided Wave Letters, vol. 10, no. 4, pp. 142-144, Apr. 2000.
26. H.-T. Kim, J.-H. Park, Y.-K. Kim, and Y. Kwon, V-band low-loss and low-voltage distributed MEMS digital phase shifter using metal-ait-metal capacitors, in International Microwave Symposium Digest. IEEE, June 2002, pp. 341-344.
27. D.A. Koester, R. Mahadevan, B. Hardy, and K. W. Markus, MUMPS Design Handbook, 6th ed., Cronos Integrated Microsystem (a JDS Uniphase company), 3026 Cornwallis Rd., Research Triangle Park, NC 27709, Feb. 2001.
28. A.K. Goel, High-speed VLSI interconnections, Wiley Interscience, New York, 1994.
29. R. Marks, A multiline method for network analyzer calibration, IEEE Trans Microwave Theory Technol 39 (1991), 1205-1215.
30. D. Williams and R. Marks, NIST program multiCal user guide, 1st ed., NIST MIcrowave Metrology Group, Boulder, CO, 1995.
31. Agilent momentum manual, 3rd ed., Agilent Technologies, Pato Alto, CA, 2000.
32. I.J. Bahl and K.C. Gupta, Design of loaded-line p-i-n diode phase shifter circuits, IEEE Trans Microwave Theory Technol 28 (1980), 219-224.
33. K.C. Gupta, I.J. Bahl, and P. Bhartia, Microwave solid-state circuit design, Wiley Interscience, New York, 1988, ch. 12, pp. 601-675.
34. R. Ramadoss, Modeling, design and characterization of polyimide film-based RF MEMS switches, Ph.D. dissertation, University of Colorado at Boulder, 2002.
35. J. Hayden and G. Rebeiz, 2-bit MEMS distributed X-band phase shifters, IEEE Microwave Guided Wave Lett 10 (2000), 540-542.