MEMS oscillating squeeze-film pressure sensor with optoelectronic feedback

Journal of Micromechanics and Microengineering

Volumn 25, Issue 4, 2015, Pages

  Kumar, Lalit ^a   Reimann, Klaus ^b   Goossens, Martijn J ^b   Besling, Willem F A ^b   Dolleman, Robin J ^a   Pijnenburg, Remco H W ^b   Van Der Avoort, Cas ^b   Sarro, Lina P M ^a   Steeneken, Peter G ^a,b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b NXP SEMICONDUCTORS   (Netherlands)

Author keywords

MEMS; oscillator; pressure; resonator; sensor; squeeze film

Indexed keywords

GAIN CONTROL; LASER DOPPLER VELOCIMETERS; MEMS; OSCILLATORS (ELECTRONIC); PRESSURE; QUARTZ; RESONATORS; SENSORS;

ALLAN DEVIATION; AUTOMATIC GAIN CONTROL CIRCUIT; LASER DOPPLER VIBROMETERS; MECHANICAL OSCILLATIONS; OPTOELECTRONIC FEEDBACK; OSCILLATING PRESSURE; SQUEEZE FILM EFFECTS; SQUEEZE FILMS;

PRESSURE SENSORS;

EID: 84925780231     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/25/4/045011     Document Type: Article

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