Simultaneous magnetic and electrostatic driving of microcantilevers

Sensors and Actuators, A: Physical

Volumn 136, Issue 1, 2007, Pages 347-357

  Malo, Javier ^a   Izpura, José Ignacio ^a  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

Author keywords

Cantilever; Electrostatic driving; High order vibration mode; Magnetic driving; Microsensor

Indexed keywords

DIELECTRIC RELAXATION; ELECTRIC SHIELDING; MAGNETIC PROPERTIES; MICROSENSORS; VIBRATION CONTROL;

CANTILEVERS; ELECTROSTATIC DRIVING; HIGH ORDER VIBRATION MODES; MAGNETIC DRIVING;

ELECTRIC DRIVES;

EID: 34247153846     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.11.034     Document Type: Article

References (18)

1. Raiteri R., Grattarola M., Butt H.-J., and Skládal P. Micromechanical cantilever-based biosensors. Sens. Actuators B-Chem. 79 (2001) 115-126
2. Vidic A., Then D., and Ziegler Ch. A new cantilever system for gas and liquid sensing. Ultramicroscopy 97 (2003) 407-416
3. Tamayo J. Study of the noise of micromechanical oscillators under quality factor enhancement via driving force control. J. Appl. Phys. 97 (2005) 044903-044913
4. Olivares J., Malo J., González S., Iborra E., Izpura I., Clement M., Sanz-Hervás A., Sánchez-Rojas J.L., and Sanz P. Tunable mechanical resonator with aluminum nitride piezoelectric actuation. Proceedings of SPIE, vol. 6186 (2006). 0-8194-6242-X
5. Han W., Lindsay S.M., and Jing T. A magnetically driven oscillating probe microscope for operation in liquids. Appl. Phys. Lett. 69 (1996) 4111-4113
6. Liang S., Medich D., Czajkowsky D.M., Sheng S., Yuan J.-Y., and Shao Z. Thermal noise reduction of mechanical oscillators by actively controlled external dissipative forces. Ultramicroscopy 84 (2000) 119-125
7. Cunnigham M.J., Jenkins D.F.L., and Khalid M.A.Hj. Cantilever vibration control by electrostatic actuation for magnetic force microscopy. Sens. Actuators A 63 (1997) 125-128
8. Attia P., and Hesto P. Dependence of the resonant frequency of micromachined gold microbeams on polarisation voltage. Microelectron. J. 29 (1998) 543-546
9. Attia P., Boutry M., Bosseboeuf A., and Hesto P. Fabrication and characterization of electrostatically driven silicon microbeams. Microelectron. J. 29 (1998) 641-644
10. Grant A., and McDonnell L. A non-contact mode scanning force microscope optimised to image biological samples in liquid. Ultramicroscopy 97 (2003) 177-184
11. Djuric Z. Mechanism of noise sources in microelectromechanical systems. Microelectron. Reliab. 40 (2000) 919-932
12. Motchenbacher C.D., and Fitchen F.C. Low-Noise Electronic Design (1973), John Wiley & Sons, New York (Chapter 1)
13. Pallàs-Areny R., and Webster J.G. Sensors and signal conditioning (2001), John Wiley & Sons, New York (Chapter 1)
14. Bell D.A. Noise and the Solid State (1985), Pentech Press, London (Chapter 8)
15. Johnson J.F. Hybrid infrared focal plane signal and noise model. IEEE Trans. Electron Devices 46 (1999) 96-108
16. Izpura J.I., and Malo J. 1/f noise enhancement in GaAs. AIP Conference Proceedings, vol. 780 (2005). 0-7354-0267-1 113-116
17. J. Malo, M. Sc. Thesis, Universidad Politécnica de Madrid, 2004 (in Spanish).
18. http://www.veecoprobes.com/probe_detail.asp?ClassID=84