Pressure dependent resonant frequency of micromechanical drumhead resonators

Applied Physics Letters

Volumn 94, Issue 21, 2009, Pages

  Southworth, D R ^a   Craighead, H G ^a   Parpia, J M ^a  

^a Cornell University ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BAROMETRY; LOSS MECHANISMS; MICRO-MECHANICAL; PRESSURE DEPENDENT; PRESSURE SENSITIVITIES; RESONANCE FREQUENCIES; RESONANT FREQUENCIES; RESTORING FORCES; SOUND RADIATIONS; SQUEEZE FILM EFFECTS;

ATMOSPHERIC PRESSURE; RESONATORS;

NATURAL FREQUENCIES;

EID: 66549108981     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3141731     Document Type: Article

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