Determination of parameters with uncertainties for quality control in MEMS fabrication

Journal of Microelectromechanical Systems

Volumn 22, Issue 3, 2013, Pages 613-624

  Gennat, Marc ^a,b   Meinig, Marco ^c   Shaporin, Alexey ^d   Kurth, Steffen ^c   Rembe, Christian ^e   Tibken, Bernd ^a  

^a UNIVERSITY OF WUPPERTAL   (Germany)

^b Rheinkalk GmbH   (Germany)

^c FRAUNHOFER INSTITUTE FOR ELECTRONIC NANO SYSTEMS ENAS   (Germany)

^d CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^e POLYTEC GMBH   (Germany)

Author keywords

Frequency response measurements; laser Doppler vibrometry; MEMS testing; microelectromechanical systems (MEMS) fabrication monitoring; noncontact electrostatic excitation; parameter identification; uncertainty calculation; wafer level testing

Indexed keywords

ELECTROSTATIC EXCITATION; FREQUENCY RESPONSE MEASUREMENT; LASER DOPPLER VIBROMETRY; MEMS TESTING; MICRO ELECTROMECHANICAL SYSTEM (MEMS); UNCERTAINTY CALCULATIONS; WAFER LEVEL TESTING;

ELECTRIC CONNECTORS; ELECTROMECHANICAL DEVICES; FABRICATION; FINITE ELEMENT METHOD; FREQUENCY RESPONSE; IDENTIFICATION (CONTROL SYSTEMS); LASER DOPPLER VELOCIMETERS; MEMS; MICROMECHANICS; NATURAL FREQUENCIES; OPTICAL TESTING; PARAMETER ESTIMATION; PROBES;

UNCERTAINTY ANALYSIS;

EID: 84878554660     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2236076     Document Type: Article

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