Fiber-optic laser doppler vibrometer to dynamically measure mems actuator with in-plane motion

Journal of Microelectromechanical Systems

Volumn 18, Issue 6, 2009, Pages 1365-1370

  Kim, Man Geun ^a   Jo, Kyoungwoo ^a   Kwon, Hyuk Sang ^a   Jang, Wongun ^b   Park, Youngsik ^b   Lee, Jong Hyun ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b Korea Photonics Technology Institute (KOPTI)   (South Korea)

Author keywords

45. angled optical fiber; In plane motion; Laser Doppler vibrometer (LDV); MEMS actuators; On axis optical measurement

Indexed keywords

IN-PLANE MOTION; LASER DOPPLER VIBROMETERS; MEMS ACTUATORS; ON-AXIS OPTICAL MEASUREMENT; OPTICAL MEASUREMENT;

ACOUSTIC RESONATORS; CLASSIFIERS; DOPPLER EFFECT; FIBER OPTICS; FIBERS; LASERS; MEASUREMENT ERRORS; MEMS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; OPTICAL DATA PROCESSING; OPTICAL FIBERS; OPTICAL MATERIALS; OPTICAL VARIABLES MEASUREMENT;

LASER DOPPLER VELOCIMETERS;

EID: 71549126537     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2031698     Document Type: Article

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