MEMS characterization using laser doppler vibrometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4980, Issue , 2003, Pages 51-62

  Lawrence, Eric M ^a   Speller, Kevin E ^b   Yu, Dull ^c  

^a POLYTEC GMBH   (Germany)

^b Input Output Inc   (United States)

^c NONE

Author keywords

Accelerometer; Characterization; Doppler; Laser; MEMS; Microscopic; Mirror; Optica l; Vibration; Vibrometer

Indexed keywords

DOPPLER EFFECT; LASER APPLICATIONS; TIME DOMAIN ANALYSIS; VIBRATION MEASUREMENT;

VIBROMETRY;

MICROELECTROMECHANICAL DEVICES;

EID: 0038397377     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478195     Document Type: Conference Paper

References (8)

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7. Goldberg, Howard, et. Al., "A MEMS mirror for optical scanning", Proceedings of Sensors Expo Spring 2001, pp. 331-335, Chicago, IL, June 5-7, 2001.
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