A surface micromachined resonant beam pressure sensor

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 38-41

  Melvas P ^a   Kalvesten E ^a   Stemme, G ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CATHETERS; DIAPHRAGMS; MICROMACHINING; NATURAL FREQUENCIES; PRESSURE EFFECTS; RESONANCE; VACUUM APPLICATIONS;

BEAM PRESSURE SENSORS;

PRESSURE TRANSDUCERS;

EID: 0035008064     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)