The Young's modulus of high-aspect-ratio carbon/carbon nanotube composite microcantilevers by experimental and modeling validation

Applied Physics Letters

Volumn 106, Issue 11, 2015, Pages

  Zhou, Peng ^a   Yang, Xiao ^a   He, Liang ^a   Hao, Zhimeng ^a   Luo, Wen ^a   Xiong, Biao ^a   Xu, Xu ^a   Niu, Chaojiang ^a   Yan, Mengyu ^a   Mai, Liqiang ^a  

^a WUHAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CARBON; CARBON NANOTUBES; CHEMICAL SENSORS; CLASSIFIERS; COMPOSITE MICROMECHANICS; DEGREES OF FREEDOM (MECHANICS); DOPPLER EFFECT; ELASTIC MODULI; LASER DOPPLER VELOCIMETERS; LASER THEORY; NATURAL FREQUENCIES; VIBRATION MEASUREMENT; YARN;

FINITE ELEMENT SIMULATIONS; HIGH ASPECT RATIO; LASER DOPPLER VIBROMETERS; MICRO-CANTILEVER ARRAYS; MICRO-CANTILEVERS; MICROFABRICATION PROCESS; NANOTUBE COMPOSITES; SINGLE DEGREE OF FREEDOMS;

FINITE ELEMENT METHOD;

EID: 84925047389     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4915514     Document Type: Article

References (26)

1. G. Stemme, J. Micromech. Microeng. 1, 113 (1991). 10.1088/0960-1317/1/2/004
2. V. Snitka, R. D. Rodrigues, and V. Lendraitis, Microelectron. Eng. 88, 2759 (2011). 10.1016/j.mee.2011.02.046
3. V. Seena, A. Fernandes, P. Pant, S. Mukherji, and V. R. Rao, Nanotechnology 22, 295501 (2011). 10.1088/0957-4484/22/29/295501
4. D. W. Lee, T. Ono, and M. Esashi, Sens. Actuators, A 83, 11 (2000). 10.1016/S0924-4247(99)00378-7
5. I.-C. Chen, L.-H. Chen, A. Gapin, S. Jin, L. Yuan, and S.-H. Liou, Nanotechnology 19, 075501 (2008). 10.1088/0957-4484/19/7/075501
6. H. J. H. Chen and C. S. Hung, Nanotechnology 18, 355305 (2007). 10.1088/0957-4484/18/35/355305
7. X. X. Li, T. Ono, Y. L. Wang, and M. Esashi, Appl. Phys. Lett. 83, 3081 (2003). 10.1063/1.1618369
8. J. L. Yang, T. Ono, and M. Esashi, Sens. Actuators, A 82, 102 (2000). 10.1016/S0924-4247(99)00319-2
9. D. Sheeja, B. K. Tay, L. J. Yu, D. H. C. Chua, W. I. Milne, J. Miao, and Y. Q. Fu, Diamond Relat. Mater. 12, 1495 (2003). 10.1016/S0925-9635(03)00182-1
10. D. Sheeja, B. K. Tay, S. P. Lau, L. J. Yu, J. M. Miao, H. C. Chua, and W. I. Milne, Sens. Actuators, B 98, 275 (2004). 10.1016/j.snb.2003.10.026
11. J.-Y. Igaki, K.-I. Nakamatsu, R. Kometani, K. Kanda, Y. Haruyama, T. Kaito, and S. Matsui, J. Vac. Sci. Technol., B 24 (6), 2911 (2006). 10.1116/1.2357960
12. D. H. C. Chua, B. K. Tay, P. Zhang, E. H. T. Teo, L. T. W. Lim, S. O'Shea, J. Miao, and W. I. Milne, Diamond Relat. Mater. 13, 1980 (2004). 10.1016/j.diamond.2004.08.002
13. E. D. Feng and R. E. Jones, Phys. Rev. B 83, 195412 (2011). 10.1103/PhysRevB.83.195412
14. M. Lu, M.-W. Jang, S. A. Campbell, and T. H. Cui, J. Vac. Sci. Technol., B 28 (3), 522 (2010). 10.1116/1.3377142
15. J. A. Lee, K.-C. Lee, S. I. Park, and S. S. Lee, Nanotechnology 19, 215302 (2008). 10.1088/0957-4484/19/21/215302
16. H.-S. Min, B. Y. Park, L. Taherabadi, C. L. Wang, Y. Yeh, R. Zaouk, M. J. Madou, and B. Dunn, J. Power Sources 178, 795 (2008). 10.1016/j.jpowsour.2007.10.003
17. C. Balázsi, B. Fényi, N. Hegman, Z. Kövér, F. Wéber, Z. Vértesy, Z. Kónya, I. Kiricsi, L. P. Biró, and P. Arató, Composites, Part B 37, 418 (2006). 10.1016/j.compositesb.2006.02.006
18. F. T. Fisher, R. D. Bradshaw, and L. C. Brinson, Appl. Phys. Lett. 80 (24), 4647 (2002). 10.1063/1.1487900
19. K. Inaba, K. Saida, P. Ghosh, K. Matsubara, M. Subramanian, A. Hayashi, Y. Hayashi, M. Tanemura, M. Kitazawa, and R. Ohta, Carbon 49, 4191 (2011). 10.1016/j.carbon.2011.05.051
20. S. L. Ruan, P. Gao, X. G. Yang, and T. X. Yu, Polymer 44, 5643 (2003). 10.1016/S0032-3861(03)00628-1
21. L. He, M. Toda, Y. Kawai, H. Miyashita, M. Omori, T. Hashida, R. Berger, and T. Ono, Microsyst. Technol. 20 (2), 201 (2014). 10.1007/s00542-013-1771-6
22. L. He, M. Toda, Y. Kawai, M. F. Sarbi, M. Omori, T. Hashida, and T. Ono, IEEJ Trans. Sens. Micromach. 132 (11), 425 (2012). 10.1541/ieejsmas.132.425
23. J. P. Cleveland, S. Manne, D. Bocek, and P. K. Hansma, Rev. Sci. Instrum. 64, 403 (1993). 10.1063/1.1144209
24. B. Ilic, S. Krylov, and H. G. Craighead, J. Appl. Phys. 108, 044317 (2010). 10.1063/1.3474987
25. L. Xiong, Q. Zhou, Y. Wu, and P. Chen, Mech. Syst. Sig. Process. 50-51, 227 (2015). 10.1016/j.ymssp.2014.05.012
26. M. L. Chandravanshi and A. K. Mukhopadhyay, in Proc. ASME IMECE (2013), p. 62533.