Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis

Microsystem Technologies

Volumn 20, Issue 2, 2014, Pages 201-208

  He, Liang ^a   Toda, Masaya ^a   Kawai, Yusuke ^a   Miyashita, Hidetoshi ^a   Omori, Mamoru ^a   Hashida, Toshiyuki ^a   Berger, Rüdiger ^b   Ono, Takahito ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b MAX PLANCK INSTITUTE FOR POLYMER RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROSTRUCTURES; FABRICATION METHOD; HIGH ASPECT RATIO; INERT ATMOSPHERES; MICRO-FABRICATION TECHNOLOGY; MICRO/NANOSTRUCTURES; NANO-INDENTATION MEASUREMENTS; ULTRA-MICROINDENTATION;

ASPECT RATIO; COMPOSITE FILMS; FABRICATION; MICROMETERS; PHOTORESISTS;

MICROSTRUCTURE;

EID: 84893735613     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-013-1771-6     Document Type: Article

References (38)

1. Ashrafi B, Hubert P, Vengallatore S (2006) Carbon nanotube-reinforced composites as structural materials for microactuators in microelectromechanical systems. Nanotechnology 17:4895-4903
2. 4 composites with improved mechanical and electrical properties. Compos Part B 37:418-424
3. Chen J, Shan JY, Tsukada T, Munekane F, Kuno A, Matsuo M, Hayashi T, Kim YA, Endo M (2007) The structural evolution of thin multi-walled carbon nanotubes during isothermal annealing. Carbon 45:274-280
4. Chen W, Beidaghi M, Penmatsa V, Bechtold K, Kumari L, Li WZ, Wang C (2010) Integration of carbon nanotubes to C-MEMS for on-chip supercapacitors. IEEE Trans Nanotechnol 9(6):734-740
5. Coleman JN, Khan U, Gun'ko YK (2006) Mechanical reinforcement of polymers using carbon nanotubes. Adv Mater 18:689-706
6. Dalton AB, Collins S, Muñoz E, Razal JM, Ebron VH, Ferraris JP, Coleman JN, Kim BG, Baughman RH (2003) Super-tough carbon-nanotube fibres. Nature 423:703
7. Du R, Ssenyange S, Aktary M, McDermott MT (2009) Fabrication and characterization of graphitic carbon nanostructures with controllable size, shape, and position. Small 5(10):1162-1168
8. Eitan A, Fisher FT, Andrews R, Brinson LC, Schadler LS (2006) Reinforcement mechanisms in MWCNT-filled polycarbonate. Compos Sci Technol 66:1162-1173
9. Fang W, Chu H-Y, Hsu W-K, Cheng T-W, Tai N-H (2005) Polymer-reinforced, aligned multiwalled carbon nanotube composites for microelectromechanical systems applications. Adv Mater 17:2987-2992
10. Fujita T, Maenaka K, Takayama Y (2005) Dual-axis MEMS mirror for large deflection-angle using SU-8 soft torsion beam. Sens Actua A 121:16-21
11. He L, Toda M, Kawai Y, Sarbi MF, Omori M, Hashida T, Ono T (2012) Fabrication of a Si-PZT hybrid XY-microstage with CNT-carbon hinges. IEEJ Trans Sens Micromach 132(11):425-426
12. Jiang X, Reichelt K, Stritzker B (1989) The hardness and Young's modulus of amorphous hydrogenated carbon and silicon films measured with an ultralow load indenter. J Appl Phys 66(12):5805-5808
13. Jönsson B, Hogmark S (1984) Hardness measurements of thin films. Thin Solid Films 114:257-269
14. Kim YA, Hayashi T, Endo M, Kaburagi Y, Tsukada T, Shan J, Osato K, Tsuruoka S (2005) Synthesis and structural characterization of thin multi-walled carbon nanotubes with a partially facetted cross section by a floating reactant method. Carbon 43:2243-2250
15. Kudrle TD, Wang CC, Bancu MG, Hsiao JC, Pareek A, Waelti M, Kirkos GA, Shone T, Fung CD, Mastrangelo CH (2005) Single-crystal silicon micromirror array with polysilicon flexures. Sens Actua A 119:559-566
16. Lau K-T, Hui D (2002) The revolutionary creation of new advanced materials-carbon nanotube composites. Compos Part B 33:263-277
17. Lee JA, Lee K-C, Park SI, Lee SS (2008a) The fabrication of carbon nanostructures using electron beam resist pyrolysis and nanomachining processes for biosensing applications. Nanotechnology 19:215302
18. Lee JA, Lee SW, Lee K-C, Park SI, Lee SS (2008b) Fabrication and characterization of freestanding 3D carbon microstructures using multi-exposures and resist pyrolysis. J Micromech Microeng 18:035012
19. Linden WEVD, Dieker JW (1980) Glassy carbon as electrode material in electroanalytical chemistry. Anal Chim Acta 119:1-24
20. Lorenz H, Despont M, Fahrni N, Brugger J, Vettiger P, Renaud P (1998) High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS. Sens Actua A 64:33-39
21. Malladi K, Wang C, Madou M (2006) Fabrication of suspended carbon microstructures by E-beam writer and pyrolysis. Carbon 44:2602-2607
22. Min H-S, Park BY, Taherabadi L, Wang C, Yeh Y, Zaouk R, Madou MJ, Dunn B (2008) Fabrication and properties of a carbon/polypyrrole three-dimensional microbattery. J Power Sources 178:795-800
23. Penmatsa V, Kawarada H, Wang C (2012) Fabrication of carbon nanostructures using photo-nanoimprint lithography and pyrolysis. J Micromech Microeng 22:045024
24. Rahman S, Yang H (2003) Nanopillar arrays of glassy carbon by anodic aluminium oxide nanoporous templates. Nano Lett 3:439-442
25. Schueller Olivier JA, Brittain ST, Marzolin C, Whitesides GM (1997) Fabrication and characterization of glassy carbon MEMS. Chem Mater 9:1399-1406
26. Schueller Olivier JA, Brittain ST, Whitesides GM (1999) Fabrication of glassy carbon microstructures by soft lithography. Sens Actuat A 72:125-139
27. Shaffer Milo SP, Windle AH (1999) Fabrication and characterization of carbon nanotube/poly(vinyl alcohol) composites. Adv Mater 11(11):937-941
28. Sheeja D, Tay BK, Yu LJ, Chua DHC, Milne WI, Miao J, Fu YQ (2003) Fabrication of amorphous carbon cantilever structures by isotropic and anisotropic wet etching methods. Diam Relat Mater 12:1495-1499
29. Sheeja D, Tay BK, Lau SP, Yu LJ, Miao JM, Chua HC, Milne WI (2004) Fabrication of smooth amorphous carbon micro-cantilevers by lift-off. Sens Actuat B 98:275-281
30. Shen G-R, Cheng Y-T, Tsai L-N (2005) Synthesis and characterization of Ni-P-CNT's nanocomposite film for MEMS applications. IEEE Trans Nanotech 4(5):539-546
31. Thostenson ET, Ren Z, Chou T-W (2001) Advances in the science and technology of carbon nanotubes and their composites: a review. Comp Sci Technol 61:1899-1912
32. Tsukamoto Y, Yamaguchi H, Yanagisawa M (1987) Mechanical properties of thin films: measurement of ultramicroindentation hardness, Young's modulus and internal stress. Thin Solid Films 154:171-181
33. Vigolo B, Pénicaud A, Coulon C, Sauder C, Pailler R, Journet C, Bernier P, Poulin P (2000) Macroscopic fibers and ribbons of oriented carbon nanotubes. Science 290:1331-1334
34. Wang C, Madou M (2005) From MEMS to NEMS with carbon. Biosens Bioelectron 20:2181-2187
35. Wang C, Jia G, Taherabadi LH, Madou MJ (2005) A novel method for the fabrication of high-aspect ratio C-MEMS structures. J Microelectromech Syst 14:348-357
36. Xu H, Malladi K, Wang C, Kulinsky L, Song M, Madou M (2008) Carbon post-microarrays for glucose sensors. Biosens Bioelectron 23:1637-1644
37. Yamamoto G, Suk JW, An J, Piner RD, Hashida T, Takagi T, Ruoff RS (2010) The influence of nanoscale defects on the fracture of multi-walled carbon nanotubes under tensile loading. Diam Relat Mater 19:748-751
38. Yang J-H, Penmatsa V, Tajima S, Kawarada H, Wang C (2009) Direct amination on 3-dimensional pyrolyzed carbon micropattern surface for DNA detection. Mater Lett 63:2680-2683