Fabrication of a Si-PZT hybrid XY-microstage with CNT-carbon hinges

IEEJ Transactions on Sensors and Micromachines

Volumn 132, Issue 11, 2012, Pages 425-426

  He, Liang ^a   Toda, Masaya ^a   Kawai, Yusuke ^a   Sarbi, Mohd Faizul ^b   Omori, Mamoru ^a   Hashida, Toshiyuki ^a   Ono, Takahito ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b UNIVERSITY OF MALAYA   (Malaysia)

Author keywords

Carbon nanotube; Microfabrication; Microstage; PZT actuators

Indexed keywords

ACTUATORS; CARBON CARBON COMPOSITES; COMPOSITE MATERIALS; HINGES; MICROFABRICATION; NANOTUBES; SILICON; YARN;

CARBON COMPOSITES; FLEXIBLE HINGES; MECHANICAL HYSTERESIS; MICRO STAGES; MICROMOLDING; PZT ACTUATOR;

CARBON NANOTUBES;

EID: 84869770003     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.132.425     Document Type: Review

References (9)

1. P. Vettiger, G. Cross, M. Despont, U. Drechsler, U. Durig, B. Gotsmann, W. Haberle, M. A. Lantz, H. E. Rothuizen, R. Stutz, and G. K. Binning : "The "Millipede" - Nanotechnology Entering Data Storage", IEEE Trans. Nanotechnol., Vol.1, pp.39-55 (2002)
2. C. Ataman, Y. Petremand, H. Urey, W. Noell, M. Epitaux, and N. F. de Rooji : "A 2D MEMS stage for optical applications", Proc. of SPIE, Vol.6186, 618601 (2006)
3. K. T. Lau and D. Hui : "The revolutionary creation of new advanced materials - carbon nanotube composites", Composites Part B, Vol.33, pp.263-277 (2002)
4. 4 composites with improved mechanical and electrical properties", Composite Part B, Vol.37, pp.418-424 (2006)
5. M. F. M. Sabri, T. Ono, and M. Esashi : "Modeling and experimental validation of the performance of a silicon XY-microstage driven by PZT actuators", J. Micromech. Microeng. Vol.19, 095004 (2009)
6. L. He, M. Toda, Y. Kawai, H. Miyashita, C. Y. Shao, M. Omori, T. Hashida, and T. Ono : "Fabrication of high aspect ratio carbon nanotube-carbon composite microstructures based on silicon molding technique", Proceeding of International Conference on Solid-State Sensors, Actuators and Microsystems, 16, pp.2331-2334 (2011)
7. M. F. M. Sabri, T. Ono, and M. Esashi : "A large displacement piezodriven silicon XY-microstage", Porceeding of International Conference on Solid-State Sensors, Actuators and Microsystems, 15, pp.2405-2408 (2009)
8. H. Xu, T. Ono, D. Y. Zhang, and M. Esashi : "Fabrication and characterizations of a monolithic PZT microstage", Microsyst Technol., Vol.12, pp.883-890 (2006)
9. M. F. M. Sabri, T. Ono, and M. Esashi : "Microassembly of PZT Actuators into Silicon Microstructures", IEEJ Trans. on Sensors and Micromachines, Vol.129, No.12, pp.471-472 (2009)