High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient

Applied Physics Letters

Volumn 105, Issue 13, 2014, Pages

  Wang, Wenbo ^a   Mayrhofer, Patrick M ^b   He, Xingli ^a   Gillinger, Manuel ^b   Ye, Zhi ^a   Wang, Xiaozhi ^a   Bittner, Achim ^b   Schmid, Ulrich ^b   Luo, J K ^a,c  

^a ZHEJIANG UNIVERSITY   (China)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^c UNIVERSITY OF BOLTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL COUPLING COEFFICIENTS;

EID: 84907652982     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4896853     Document Type: Article

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