Surface acoustic wave devices based on AlN/sapphire structure for high temperature applications

Applied Physics Letters

Volumn 96, Issue 20, 2010, Pages

  Aubert, Thierry ^a   Elmazria, Omar ^a   Assouar, Badreddine ^a   Bouvot, Laurent ^a   Oudich, Mourad ^a  

^a INSTITUT JEAN LAMOUR   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AIR ATMOSPHERE; ALN FILMS; FREQUENCY CHARACTERIZATION; HIGH TEMPERATURE; LAYERED STRUCTURES; POTENTIAL SUBSTRATE; SAW DELAY LINE; SCANNING ELECTRONS; SURFACE ACOUSTIC WAVE DEVICE; X-RAY DIFFRACTION MEASUREMENTS;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; ATOMIC FORCE MICROSCOPY; HIGH TEMPERATURE APPLICATIONS; X RAY DIFFRACTION;

ACOUSTIC WAVES;

EID: 77953011890     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3430042     Document Type: Article

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