SCOPUS 정보 검색 플랫폼

Volumn 83, Issue 8, 2003, Pages 1641-1643

High-frequency, high-sensitivity acoustic sensor implemented on ALN/Si substrate

a CNR (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ATMOSPHERIC HUMIDITY; CHEMICAL SENSORS; PLASTIC FILMS; SILICON; SPUTTERING; SUBSTRATES;

ACOUSTIC SENSORS;

ALUMINUM NITRIDE;

EID: 0042281585 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1604482 Document Type: Article

Times cited : (57)

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