Cost-effective and high frequency surface acoustic wave filters on ZnO:Fe/Si for low-loss and wideband application

Applied Physics Letters

Volumn 101, Issue 17, 2012, Pages

  Luo, J T ^a   Pan, F ^b   Fan, P ^a   Zeng, F ^b   Zhang, D P ^a   Zheng, Z H ^a   Liang, G X ^a  

^a SHENZHEN UNIVERSITY   (China)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CONVENTIONAL PHOTOLITHOGRAPHY; ELECTRO MECHANICAL COUPLING FACTORS; HIGH FREQUENCY; HIGH-FREQUENCY SURFACES; INTRINSIC FACTORS; PIEZOELECTRIC COEFFICIENT; SA WFILTER; SAW PROPERTIES; WIDE-BAND; WIDEBAND APPLICATIONS; ZNO; ZNO FILMS;

ACOUSTIC SURFACE WAVE DEVICES; ELECTROMECHANICAL COUPLING; IRON; METALLIC FILMS; PHOTOLITHOGRAPHY; ZINC OXIDE;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 84868014741     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4764540     Document Type: Article

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