Solution processing and resist-free nanoimprint fabrication of thin film chalcogenide glass devices: Inorganic-organic hybrid photonic integration

Advanced Optical Materials

Volumn 2, Issue 8, 2014, Pages 759-764

  Zou, Yi ^a   Moreel, Loise ^a   Lin, Hongtao ^a   Zhou, Jie ^a   Li, Lan ^a   Danto, Sylvain ^b   Musgraves, J David ^c   Koontz, Erick ^d   Richardson, Kathleen ^e   Dobson, Kevin D ^f   Birkmire, Robert ^a,f   Hu, Juejun ^a  

^a UNIVERSITY OF DELAWARE   (United States)

^b UNIVERSITÉ DE BORDEAUX   (France)

^c IRradiance Glass Inc   (United States)

^d Clemson University   (United States)

^e University of Central Florida   (United States)

^f UNIVERSITY OF DELAWARE   (United States)

Author keywords

Chalcogenide glasses; Hybrid photonics; Polymer substrates; Solution deposition; Thermal nanoimprints

Indexed keywords

EID: 84906488965     PISSN: None     EISSN: 21951071     Source Type: Journal    
DOI: 10.1002/adom.201400068     Document Type: Article

References (51)

1. S. Y. Chou, P. R. Krauss, P. J. Renstrom, Science 1996, 272, 85.
2. L. J. Guo, Adv. Mater. 2007, 19, 495;
3. H. Schift, J. Vac. Sci. Technol. B 2008, 26, 458
4. L. J. Guo, Adv. Mater. 2007, 19, 495;
5. S. H. Ahn, L. J. Guo, Adv. Mater. 2008, 20, 2044.
6. C. Y. Chao, L. J. Guo, J. Vac. Sci. Technol. B 2002, 20, 2862.
7. C. Stuart, Y. Chen, ACS Nano 2009, 3, 2062.
8. H. Ma, A. K. Y. Jen, L. R. Dalton, Adv. Mater. 2002, 14, 1339;
9. J. Cavagnaro, http://www.laserfocusworld.com/articles/print/volume-47/issue-9/features/polymer-optics-progress-in-plastic-optics-follows-advances-in-materials-and-manufacturing.html, accessed: September, 2013;
10. L. Eldada, L. W. Shacklette, IEEE J. Sel. Top. Quantum Electron. 2000, 6, 54.
11. C. M. Chang, C. L. Chang, C. C. Chang, Macromol. Mater. Eng. 2006, 291, 1521
12. C. L. Lu, Z. C. Cui, Z. Li, B. Yang, J. C. Shen, J. Mater. Chem. 2003, 13, 526;
13. N. Suzuki, Y. Tomita, Opt. Express 2006, 14, 12712;
14. A. H. Yuwono, B. H. Liu, J. M. Xue, J. Wang, H. I. Elim, W. Ji, Y. Li, T. J. White, J. Mater. Chem. 2004, 14, 2978;
15. M. Yoshida, P. N. Prasad, Chem. Mater. 1996, 8, 235.
16. M. M. Demir, K. Koynov, U. Akbey, C. Bubeck, I. Park, I. Lieberwirth, G. Wegner,Macromolecules 2007, 40, 1089;
17. L. Q. Qiu, K. Saravanamuttu, J. Opt. 2012, 14.
18. K. Tanaka, Semiconductors 1998, 32, 861.
19. S. Danto, P. Houizot, C. Boussard-Pledel, X. H. Zhang, F. Smektala, J. Lucas, Adv. Funct. Mater. 2006, 16, 1847;
20. V. K. Tikhomirov, D. Furniss, A. B. Seddon, J. A. Savage, P. D. Mason, D. A. Orchard, K. L. Lewis, Infrared Phys. Technol. 2004, 45, 115.
21. T. Guiton, C. Pantano, Chem. Mater. 1989, 1, 558;
22. Y. L. Zha, S. Fingerman, S. J. Cantrell, C. B. Arnold, J. Non-Cryst. Solids 2013, 369, 11
23. Y. Zou, H. T. Lin, O. Ogbuu, L. Li, S. Danto, S. Novak, J. Novak, J. D. Musgraves, K. Richardson, J. J. Hu, Opt. Mater. Express 2012, 2, 1723;
24. T. Kohoutek, T. Wagner, M. Vlcek, M. Frumar, J. Non-Cryst. Solids 2006, 352, 1563;
25. T. Kohoutek, T. Wagher, M. Vlcek, M. Frumar, J. Non-Cryst. Solids, 2005, 351, 2205
26. T. Kohoutek, T. Wagner, J. Orava, M. Krbal, A. Fejfar, T. Mates, S. O. Kasap, M. Frumar, J. Non-Cryst. Solids 2007, 353, 1437;
27. Y. L. Zha, C. B. Arnold, Opt. Mater. Express 2013, 3, 309;
28. Y. L. Zha, P. T. Lin, L. Kimerling, A. Agarwal, C. B. Arnold, ACS Photonics 2014, 1, 153;
29. Y. L. Zha, M. Waldmann, C. B. Arnold, Opt. Mater. Express 2013, 3, 1259.
30. X. Sheng, C. Bower, S. Bonafede, J. Wilson, B. Fisher, M. Meitl, H. Yuen, S. Wang, L. Shen, S. Burroughs, J. A. Rogers, Nat. Mater. 2014, DOI: 10.1038/nmat3946.
31. C. Tsay, Y. L. Zha, C. B. Arnold, Opt. Express 2010, 18, 26744.
32. C. Tsay, F. Toor, C. F. Gmachl, C. B. Arnold, Opt. Lett. 2010, 35, 3324.
33. T. Han, S. Madden, D. Bulla, B. Luther-Davies, Opt. Express 2010, 18, 19286;
34. Z. G. Lian, W. J. Pan, D. Furniss, T. M. Benson, A. B. Seddon, T. Kohoutek, J. Orava, T. Wagner, Opt. Lett. 2009, 34, 1234;
35. J. Orava, T. Kohoutek, A. L. Greer, H. Fudouzi, Opt. Mater. Express 2011, 1, 796;
36. W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, A. B. Seddon, Microw. Opt. Technol. Lett. 2008, 50, 1961;
37. M. Silvennoinen, K. Paivasaari, J. J. J. Kaakkunen, V. K. Tikhomirov, A. Lehmuskero, P. Vahimaa, V. V. Moshchalkov, Appl. Surf. Sci. 2011, 257, 6829;
38. M. Solmaz, H. Park, C. K. Madsen, X. Cheng, J. Vac. Sci. Technol. B 2008, 26, 606;
39. I. Yamada, N. Yamashita, K. Tani, T. Einishi, M. Saito, K. Fukumi, J. Nishii, Opt. Lett. 2011, 36, 3882;
40. Y. Zou, D. Zhang, H. T. Lin, L. Li, L. Moreel, J. Zhou, Q. Y. Du, O. Ogbuu, S. Danto, J. D. Musgraves, K. Richardson, K. Dobson, R. Birkmire, J. Hu, Adv. Optical Mater. 2014, DOI: 10.1002/adom.201300489;
41. A. B. Seddon, W. J. Pan, D. Furniss, C. A. Miller, H. Rowe, D. Zhang, E. McBrearty, Y. Zhang, A. Loni, P. Sewell, T. M. Benson, J. Non-Cryst. Solids 2006, 352, 2515.
42. C. Tsay, E. Mujagic, C. K. Madsen, C. F. Gmachl, C. B. Arnold, Opt. Express 2010, 18, 15523.
43. W. C. Cash, Appl. Optics 1984, 23, 4518
44. S. Singh, Opt. Laser Technol. 1999, 31, 195.
45. T. Harada, T. Kita, Appl. Optics 1980, 19, 3987;
46. Y. J. Xie, Z. Q. A. Lu, F. Y. Li, J. L. Zhao, Z. C. Weng, Opt. Express 2002, 10, 1043.
47. L. Li, H. T. Lin, S. Qiao, Y. Zou, S. Danto, K. Richardson, J. D. Musgraves, N. Lu, J. Hu, unpublished;
48. L. Li, Y. Zou, H. T. Lin, J. J. Hu, X. C. Sun, N. N. Feng, S. Danto, K. Richardson, T. Gu, M. Haney, J. Lightwave Technol. 2013, 31, 4080.
49. J. D. Musgraves, P. Wachtel, S. Novak, J. Wilkinson, K. Richardson, J. Appl. Phys. 2011, 110, 063503;
50. L. Petit, N. Carlie, F. Adamietz, M. Couzi, V. Rodriguez, K. C. Richardson, Mater. Chem. Phys. 2006, 97, 64.
51. C. Pina-Hernandez, V. Lacatena, G. Calafiore, S. Dhuey, K. Kravtsov, A. Goltsov, D. Olynick, V. Yankov, S. Cabrini, C. Peroz, Nanotechnology 2013, 24, 065301.