Soft imprint lithography of a bulk chalcogenide glass

Optical Materials Express

Volumn 1, Issue 5, 2011, Pages 796-802

  Orava, Jiri ^a,b   Kohoutek, Tomas ^b,c   Lindsay Greer, A ^a   Fudouzi, Hiroshi ^d  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF PARDUBICE   (Czech Republic)

^c TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

^d NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BULK GLASS; CHALCOGENIDE GLASS; EXTERNAL PRESSURES; GLASS SURFACES; HIGH REFRACTIVE INDEX; LENS ARRAY; MEAN-SQUARE; MICRO PATTERNING; SOFT-IMPRINT; TEST PATTERN;

GLASS; REFRACTIVE INDEX;

PHASE CHANGE MEMORY;

EID: 84861814936     PISSN: None     EISSN: 21593930     Source Type: Journal    
DOI: 10.1364/OME.1.000796     Document Type: Article

References (29)

1. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Nanoimprint lithography," J. Vac. Sci. Technol. B 14(6), 4129-4133 (1996).
2. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Imprint lithography with 25-nanometer resolution," Science 272(5258), 85-87 (1996).
3. Y. Xia and G. M. Whitesides, Soft lithography," Angew. Chem. Int. Ed. 37(5), 550-575 (1998).
4. Y. Xia and G. M. Whitesides, Soft lithography," Annu. Rev. Mater. Sci. 28(1), 153-184 (1998).
5. J. E. ten Elshof, S. U. Khan, and O. F. Göbel, Micrometer and nanometer-scale parallel patterning of ceramic and organic-inorganic hybrid materials," J. Eur. Ceram. Soc. 30(7), 1555-1577 (2010).
6. X. C. Shan, R. Maeda, and Y. Murakoshi, Micro hot embossing for replication of microstructures," Jpn. J. Appl. Phys. 42(Part 1, No. 6B), 3859-3862 (2003).
7. J. Viheriälä, T. Niemi, J. Kontio, T. Rytkonen, and M. Pessa, Fabrication of surface reliefs on facets of singlemode optical fibres using nanoimprint," Electron. Lett. 43(3), 150-151 (2007).
8. M. Bender, U. Plachetka, J. Ran, A. Fuchs, B. Vratzov, H. Kurz, T. Glinsner, and F. Lindner, High resolution lithography with PDMS molds," J. Vac. Sci. Technol. B 22(6), 3229-3232 (2004).
9. A. Zakery and S. R. Elliott, Optical properties and applications of chalcogenide glasses: a review," J. Non-Cryst. Solids 330(1-3), 1-12 (2003).
10. J. S. Sanghera, L. B. Shaw, and I. D. Aggarwal, Chalcogenide glass-fiber-based Mid-IR sources and applications," IEEE J. Sel. Top. Quantum Electron. 15(1), 114-119 (2009).
11. S. N. Taraskin and S. R. Elliott, Phonons in vitreous silica: dispersion and localization," Europhys. Lett. 39(1), 37-42 (1997).
12. A. Mori, Tellurite-based fibers and their applications to optical communication networsk," J. Ceram. Soc. Jpn. 116(1358), 1040-1051 (2008).
13. G. Qin, X. Yan, C. Kito, M. Liao, C. Chaudhari, T. Suzuki, and Y. Ohishi, Ultrabroadband supercontinuum generation from ultraviolet to 6.28 μm in a fluoride fiber," Appl. Phys. Lett. 95(16), 161103 (2009).
14. T. Han, S. Madden, D. Bulla, and B. Luther-Davies, Low loss chalcogenide glass waveguides by thermal nanoimprint lithography," Opt. Express 18(18), 19286-19291 (2010).
15. J. S. Sanghera, I. D. Aggarwal, L. B. Shaw, L. E. Busse, P. Thielen, V. Nguyen, P. Pureza, S. Bayya, and F. Kung, Application of chalcogenide glass optical fibers at NRL," J. Optoelectron. Adv. Mater. 3, 627-640 (2001).
16. R. Stepien, R. Buczynski, D. Pysz, I. Kujawa, A. Filipkowski, M. Mirkowska, and R. Diduszko, Development of thermally stable tellurite glasses designed for fabrication of microstructured optical fibers," J. Non-Cryst. Solids 357(3), 873-883 (2011).
17. D. C. Harris, Materials for Infrared Windows and Domes: Properties and Performance (SPIE, 1999).
18. H. Ticha and L. Tichy, Semiempirical relation between non-linear susceptibility (refractive index), linear refractive index and optical gap and its applications to amorphous chalcogenides," J. Optoelectron. Adv. Mater. 4, 381-386 (2002).
19. Z. G. Lian, W. Pan, D. Furniss, T. M. Benson, A. B. Seddon, T. Kohoutek, J. Orava, and T. Wagner, Embossing of chalcogenide glasses: monomode rib optical waveguides in evaporated thin films," Opt. Lett. 34(8), 1234-1236 (2009).
20. I. Horcas, R. Fernández, J. M. Gómez-Rodríguez, J. Colchero, J. Gómez-Herrero, and A. M. Baro, WSXM: a software for scanning probe microscopy and a tool for nanotechnology," Rev. Sci. Instrum. 78(1), 013705 (2007).
21. D. G. Georgiev, P. Boolchand, and K. A. Jackson, Intrinsic nanoscale phase separation of bulk As2S3 glass," Philos. Mag. 83(25), 2941-2953 (2003).
22. C. A. Angell, Formation of glasses from liquids and biopolymers," Science 267(5206), 1924-1935 (1995).
23. G. P. Johari, On Poission's ratio of glass and liquid vitrification characteristics," Philos. Mag. 86(11), 1567-1579 (2006).
24. S. N. Yannopoulos and M. L. Trunov, Photoplastic effects in chalcogenide glasses: a review," Phys. Status Solidi B 246(8), 1773-1785 (2009).
25. B. G. Aitken, D. K. Chatterjee, and D. H. Raguin, Low-temperature fabrications of glass optical components," US Patent 7143609, December 5, 2006.
26. J. Sanghera, C. Florea, L. Busse, B. Shaw, F. Miklos, and I. Aggarwal, Reduced Fresnel losses in chalcogenide fibers by using anti-reflective surface structures on fiber end faces," Opt. Express 18(25), 26760-26768 (2010).
27. A. B. D. Cassie and S. Baxter, Wettability of porous surfaces," Trans. Faraday Soc. 40, 546-551 (1944).
28. M. Silvennoinen, K. Paivasaari, J. J. J. Kaakkunen, V. K. Tikhomirov, A. Lehmuskero, P. Vahimaa, and V. V. Moshchalkov, Imprinting the nanostructures on the high refractive index semiconductor glass," Appl. Surf. Sci. 257(15), 6829-6832 (2011).
29. E. Ruckenstein and G. O. Berim, Microscopic description of a drop on a solid surface," Adv. Colloid Interface Sci. 157(1-2), 1-33 (2010).