Lithographic fabrication of large diffractive optical elements on a concave lens surface

Optics Express

Volumn 10, Issue 20, 2002, Pages 1043-1047

  Xie, Yongjun ^a   Lu, Zhenwu ^a   Li, Fengyou ^a   Zhao, Jingli ^a   Weng, Zhicheng ^a  

^a CHANGCHUN INSTITUTE OF OPTICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANALOG TO DIGITAL CONVERSION; DIAMOND CUTTING TOOLS; ELASTOMERS; ELECTRON BEAM LITHOGRAPHY; LASER BEAM EFFECTS; LENSES; PHOTORESISTS; ULTRAVIOLET RADIATION;

CONCAVE LENSES; CONVEX LENSES; DIAMOND MILLING; DIFFRACTIVE OPTICAL ELEMENTS (DOE); SOFT LITHOGRAPHY;

DIFFRACTIVE OPTICS;

EID: 2942713189     PISSN: 10944087     EISSN: None     Source Type: Journal    
DOI: 10.1364/OE.10.001043     Document Type: Article

References (8)

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