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Volumn 352, Issue 23-25, 2006, Pages 2515-2520
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Fine embossing of chalcogenide glasses - a new fabrication route for photonic integrated circuits
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Author keywords
Chalcogenides; Optical microscopy; Optical properties; Planar waveguides; Processing; Scanning electron microscopy; Sputtering
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Indexed keywords
OPTICAL GLASS;
OPTICAL MICROSCOPY;
OPTICAL PROPERTIES;
OPTICAL WAVEGUIDES;
PROCESSING;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING GALLIUM ARSENIDE;
SILICON WAFERS;
SPUTTERING;
CHALCOGENIDES;
PLANAR WAVEGUIDES;
SPUTTERED GLASS LAYER;
WAVELENGTH RANGE;
INTEGRATED CIRCUITS;
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EID: 33745368165
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2006.03.025 Document Type: Article |
Times cited : (53)
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References (15)
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