Time-of-flight - Energy spectrometer for elemental depth profiling - Jyväskylä design

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 337, Issue , 2014, Pages 55-61

  Laitinen, Mikko ^a   Rossi, Mikko ^a   Julin, Jaakko ^a   Sajavaara, Timo ^a  

^a UNIVERSITY OF JYVÄSKYLÄ   (Finland)

Author keywords

Elemental depth profiling; Ion beam analysis; Time of flight; Timing gate; ToF ERDA

Indexed keywords

ALUMINA; ALUMINUM OXIDE; ATOMIC LAYER DEPOSITION; CHEMICAL ELEMENTS; DATA ACQUISITION; ION BEAMS; SPECTROMETERS;

ELEMENTAL DEPTH PROFILING; ION BEAM ANALYSIS; TIME OF FLIGHT; TIMING GATE; TOF-ERDA;

DEPTH PROFILING;

EID: 84906235566     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2014.07.001     Document Type: Article

References (48)

1. H.J. Whitlow, G. Possnert, and C.S. Petersson Nucl. Instrum. Meth. B 27 1987 448
2. J. Thomas, M. Fallavier, and A. Ziani Nucl. Instrum. Meth. B 15 1986 443
3. R. Groleau, S. Gujrathi, and J. Martin Nucl. Instrum. Meth. 218 1983 11
4. J.F. Ziegler, and J.P. Biersack Treatise on Heavy-Ion Science 1985 Springer 93
5. J.F. Ziegler, SRIM-2008.04, www.srim.org, 2008.
6. R. Betts Nucl. Instrum. Meth. 162 1979 531
7. M. Döbeli, C. Kottler, M. Stocker, S. Weinmann, H. Synal, M. Grajcar, and M. Suter Nucl. Instrum. Meth. B 219 2004 415
8. C. Kottler, M. Döbeli, F. Glaus, and M. Suter Nucl. Instrum. Meth. B 248 2006 155
9. F. Busch, W. Pfeffer, B. Kohlmeyer, D. Schüll, and F. Pühlhoffer Nucl. Instrum. Meth. 171 1980 71
10. M. Döbeli, C. Kottler, F. Glaus, and M. Suter Nucl. Instrum. Meth. B 241 2005 428
11. S. Giangrandi, T. Sajavaara, B. Brijs, K. Arstila, A. Vantomme, and W. Vandervorst Nucl. Instrum. Meth. B 266 2008 5144
12. Z. Siketić, I.B. Radović, and M. Jakšić Nucl. Instrum. Meth. B 266 2008 1328
13. C. Kottler, Dünnschichtanalyse mittels Vorwärtsstreuung bei tiefer Energie (ETH Zürich, 2005) PhD. thesis.
14. M. Döbeli, R. Ender, V. Liechtenstein, and D. Vetterli Nucl. Instrum. Meth. B 142 1998 417
15. Tectra, Microchannel Plates and Microchannel Plate Detectors, http://www.tectra.de/MCP.htm (25.2.1013).
16. Hamamatsu Photonics, MCP assembly, Technical Information - Datasheet (2006).
17. R. Goruganthu, and W. Wilson Rev. Sci. Instrum. 55 1984 2030
18. M. Galanti, R. Gott, and J. Renaud Rev. Sci. Instrum. 42 1971 1818
19. ACF-METALS, Thin carbon foils, http://www.techexpo.com/firms/acf-metl. html (8.3.2013).
20. Luma-metal, Gold Plated Tungsten Wire, http://www.luma-metall.se/ products/gold-plated-tungsten-wire (25.2.2013).
21. Canberra, Passivated Implanted Planar Silicon (PIPS) detector, http://www.canberra.com/products/detectors/pips-detectors.asp (8.3.2013).
22. J. Julin et al., To be published later in Nucl. Instrum. Meth. B, (2013/2014).
23. National Instruments, PXI-7811R-FPGA product pages, http://sine.ni.com/ nips/cds/view/p/lang/en/nid/13862 (2012).
24. R.A. Baragiola Nucl. Instrum. Meth. B 78 1993 223
25. E. Sternglass Phys. Rev. 108 1957 1
26. Y. Zhang, H.J. Whitlow, T. Winzell, I.F. Bubb, T. Sajavaara, K. Arstila, and J. Keinonen Nucl. Instrum. Meth. B 149 1999 477
27. C.G. Drexler, and R.D. DuBois Phys. Rev. A 53 1996 1630
28. W. Bohne, J. Röhrich, and G. Röschert Nucl. Instrum. Meth. B 136 1998 633
29. R.L. Puurunen J. Appl. Phys. 97 2005 121301
30. K. McDonald, R.A. Weller, and V.K. Liechtenstein Nucl. Instrum. Meth. B 152 1999 171
31. V.K. Liechtenstein, T. Ivkova, E. Olshanski, I. Feigenbaum, R. DiNardo, and M. Döbeli Nucl. Instrum. Meth. A 397 1997 140
32. L. Bardelli, G. Poggi, M. Bini, G. Pasquali, and N. Taccetti Nucl. Instrum. Meth. A 521 2004 480
33. S. Giangrandi, Low-energy Elastic Recoil Detection and Ion Beam Analysis for quantitative elemental profiling of thin films (KU Leuven, 2010) PhD. thesis.
34. Max Döbeli, Private discussion, (10.9.2013).
35. M. Laitinen et al., To be published later in Nucl. Instrum. Meth. A, (2013).
36. W. Pilz, J. Borany, R. Grötzschel, W. Jiang, M. Posselt, and B. Schmidt Nucl. Instrum. Meth. B 419 1998 137
37. A. Grob, J. Grob, and P. Siffert Nucl. Instrum. Meth. 132 1976 273
38. W. Sullivan, and B. Wehring Nucl. Instrum. Meth. 116 1974 29
39. K. Kukli, M. Kemell, E. Puukilainen, J. Aarik, A. Aidla, T. Sajavaara, M. Laitinen, M. Tallarida, J. Sundqvist, M. Ritala, and M. Leskelä J. Electrochem. Soc. 158 2011 D158
40. M. Bosund, T. Sajavaara, M. Laitinen, T. Huhtio, M. Putkonen, V. Airaksinen, and H. Lipsanen Appl. Surf. Sci. 257 2011 7827
41. M. Laitinen, T. Sajavaara, M. Rossi, J. Julin, R.L. Puurunen, T. Suni, T. Ishida, H. Fujita, K. Arstila, B. Brijs, and H.J. Whitlow Nucl. Instrum. Meth. B 269 2011 3021
42. J. Hämäläinen, T. Hatanpää, E. Puukilainen, T. Sajavaara, M. Ritala, and M. Leskelä J. Mater. Chem. 21 2011 16488
43. J. Malm, E. Sahramo, J. Perälä, T. Sajavaara, and M. Karppinen Thin Solid Films 519 2011 5319
44. M. Kariniemi, J. Niinistö, T. Hatanpää, M. Kemell, T. Sajavaara, M. Ritala, and M. Leskelä Chem. Mater. 23 2011 2901
45. T.J. Knisley, T.C. Ariyasena, T. Sajavaara, M.J. Saly, and C.H. Winter Chem. Mater. 23 2011 4417
46. J. Hämäläinen, T. Sajavaara, E. Puukilainen, M. Ritala, and M. Leskelä Chem. Mater. 24 2011 55
47. R.L. Puurunen, T. Sajavaara, E. Santala, V. Miikkulainen, T. Saukkonen, M. Laitinen, and M. Leskela J. Nanosci. Technol. 11 2011 8101
48. L.J. Antila, M.J. Heikkilä, V. Mäkinen, N. Humalamäki, M. Laitinen, V. Linko, P. Jalkanen, J. Toppari, V. Aumanen, M. Kemell, P. Myllyperkiö, K. Honkala, H. Häkkinen, M. Leskelä, and J.E.I. Korppi-Tommola J. Phys. Chem. C 115 2011 16720