Quantitative evaluation of the determinants of resolution in time-of-flight spectrometers for medium energy ion beam analysis

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 152, Issue 1, 1999, Pages 171-181

  McDonald, Kyle ^a   Weller, Robert A ^a   Liechtenstein, V Kh ^b  

^a VANDERBILT UNIVERSITY   (United States)

^b KURCHATOV INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BACKSCATTERING; CARBON; COMPUTER SIMULATION; ION BEAMS; MONTE CARLO METHODS; SILICA; SILICON WAFERS; THIN FILMS;

BACKSCATTERING SPECTROMETRY;

SPECTROMETERS;

EID: 0033116692     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)01093-3     Document Type: Article

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