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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 269, Issue 24, 2011, Pages 3021-3024

Depth profiling of Al2O3 + TiO2 nanolaminates by means of a time-of-flight energy spectrometer

(11) Laitinen, M a Sajavaara, T a Rossi, M a Julin, J a Puurunen, R L b Suni, T b,c Ishida, T c Fujita, H c Arstila, K d Brijs, B d Whitlow, H J a

a UNIVERSITY OF JYVÄSKYLÄ (Finland)

b VTT TECHNICAL RESEARCH CENTRE OF FINLAND (Finland)

c INSTITUTE OF INDUSTRIAL SCIENCE (Japan)

d IMEC (Belgium)

Author keywords

Al2O3 and TiO 2; ALD; Depth profiling; ERD; Nanolaminate; ToF ERDA

Indexed keywords

ALD; DEPTH PROFILE; ELASTIC RECOIL DETECTION ANALYSIS; ENERGY SPECTROMETER; ERD; LAYER THICKNESS; NANO-LAMINATES; NANOLAMINATE; NANOLAMINATE FILMS; SINGLE LAYER; TIME OF FLIGHT; TIO; TOF-ERDA;

ALUMINUM; ATOMIC LAYER DEPOSITION; COPPER; DEPOSITION; ELECTRIC PROPERTIES; MECHANICAL PROPERTIES; SPECTROMETERS; SPECTROMETRY; SURFACE ROUGHNESS; THIN FILMS; TITANIUM DIOXIDE; VAPOR DEPOSITION;

DEPTH PROFILING;

EID: 81855194090 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/j.nimb.2011.04.074 Document Type: Conference Paper

Times cited : (14)

References (21)

1
- 0004028474
- Elsevier, Los Angeles
- M. Ritala, M. Leskelä, Handbook of Thin Films, Elsevier, Los Angeles, 2002, pp. 103-159.
- (2002) Handbook of Thin Films , pp. 103-159
- M. Ritala¹

2
- 0001628877
- T. Suntola, J. Antson, A. Pakkala, S. Lindfors, SID Digest 80 (1980) 108.
- (1980) SID Digest , vol.80 , pp. 108
- Suntola, T.¹ Antson, J.² Pakkala, A.³ Lindfors, S.⁴

3
- 67149107336
- M. Putkonen, T. Sajavaara, P. Rahkila, L. Xu, S. Cheng, L. Niinistö, and H.J. Whitlow Thin Solid Films 517 2009 5819
- (2009) Thin Solid Films , vol.517 , pp. 5819
- Putkonen, M.¹ Sajavaara, T.² Rahkila, P.³ Xu, L.⁴ Cheng, S.⁵ Niinistö, L.⁶ Whitlow, H.J.⁷

4
- 44649103257
- A.R. Sagari, P. Rahkila, M. Väisänen, R. Lehto, T. Sajavaara, S. Gorelick, M. Laitinen, M. Putkonen, S. Sangyuenyongpipat, J. Timonen, S. Cheng, and H.J. Whitlow Nucl. Instrum. Methods B 266 2008 2515
- (2008) Nucl. Instrum. Methods B , vol.266 , pp. 2515
- Sagari, A.R.¹ Rahkila, P.² Väisänen, M.³ Lehto, R.⁴ Sajavaara, T.⁵ Gorelick, S.⁶ Laitinen, M.⁷ Putkonen, M.⁸ Sangyuenyongpipat, S.⁹ Timonen, J.¹⁰ Cheng, S.¹¹ Whitlow, H.J.¹²

5
- 33751235850
- M. Law, L.E. Greene, A. Radenovic, T. Kuykendall, J. Liphardt, and P. Yang J. Phys. Chem. B 110 2006 22652
- (2006) J. Phys. Chem. B , vol.110 , pp. 22652
- Law, M.¹ Greene, L.E.² Radenovic, A.³ Kuykendall, T.⁴ Liphardt, J.⁵ Yang, P.⁶

6
- 31044455312
- J. Robertson Rep. Prog. Phys. 69 2006 327
- (2006) Rep. Prog. Phys. , vol.69 , pp. 327
- Robertson, J.¹

7
- 45249115332
- R.L. Puurunen, J. Saarilahti, and H. Kattelus ECT Trans. 11 2007 3
- (2007) ECT Trans. , vol.11 , pp. 3
- Puurunen, R.L.¹ Saarilahti, J.² Kattelus, H.³

8
- 0036647871
- J.W. Elam, Z.A. Sechrist, and S.M. George Thin Solid Films 414 2002 43 55
- (2002) Thin Solid Films , vol.414 , pp. 43-55
- Elam, J.W.¹ Sechrist, Z.A.² George, S.M.³

9
- 67349110449
- M. Heikkilä, E. Puukilainen, M. Ritala, and M. Leskelä J. Photochem. Photobiol. A 204 2009 200
- (2009) J. Photochem. Photobiol. A , vol.204 , pp. 200
- Heikkilä, M.¹ Puukilainen, E.² Ritala, M.³ Leskelä, M.⁴

10
- 0348067304
- K. Kukli, J. Ihanus, M. Ritala, and M. Leskelä Appl. Phys. Lett. 68 1996 3737
- (1996) Appl. Phys. Lett. , vol.68 , pp. 3737
- Kukli, K.¹ Ihanus, J.² Ritala, M.³ Leskelä, M.⁴

11
- 0028497950
- M. Ritala, M. Leskelä, L. Niinistö, T. Prohaska, G. Friedbacher, and M. Grasserbauer Thin Solid Films 249 1994 155
- (1994) Thin Solid Films , vol.249 , pp. 155
- Ritala, M.¹ Leskelä, M.² Niinistö, L.³ Prohaska, T.⁴ Friedbacher, G.⁵ Grasserbauer, M.⁶

12
- 0009909056
- M.B. Daia, P. Aubert, S. Labdi, C. Sant, F.A. Sadi, P. Houdy, and J.L. Bozet J. Appl. Phys. 87 2000 7753
- (2000) J. Appl. Phys. , vol.87 , pp. 7753
- Daia, M.B.¹ Aubert, P.² Labdi, S.³ Sant, C.⁴ Sadi, F.A.⁵ Houdy, P.⁶ Bozet, J.L.⁷

13
- 12244262806
- Y.S. Kim, and S.J. Yun J. Crystal Growth 274 2005 585
- (2005) J. Crystal Growth , vol.274 , pp. 585
- Kim, Y.S.¹ Yun, S.J.²

14
- 77649212139
- P.C. Rowlette, and C.A. Wolden Thin Solid Films 518 2010 3337
- (2010) Thin Solid Films , vol.518 , pp. 3337
- Rowlette, P.C.¹ Wolden, C.A.²

15
- 0032073853
- J.K. Kim, Y.S. Kim, G.D. Kim, H.W. Choi, H.J. Woo, S.Y. Cho, and C.N. Whang Nucl. Instrum. Methods B 140 1998 380
- (1998) Nucl. Instrum. Methods B , vol.140 , pp. 380
- Kim, J.K.¹ Kim, Y.S.² Kim, G.D.³ Choi, H.W.⁴ Woo, H.J.⁵ Cho, S.Y.⁶ Whang, C.N.⁷

16
- 56949087589
- S. Giangrandi, T. Sajavaara, B. Brijs, K. Arstila, A. Vantomme, and W. Vandervorst Nucl. Instrum. Methods B 266 2008 5144
- (2008) Nucl. Instrum. Methods B , vol.266 , pp. 5144
- Giangrandi, S.¹ Sajavaara, T.² Brijs, B.³ Arstila, K.⁴ Vantomme, A.⁵ Vandervorst, W.⁶

17
- 0019008484
- F. Busch, W. Pfeffer, B. Kohlmeyer, D. Schüll, and F. Pühlhoffer Nucl. Instrum. Methods 171 1980 71
- (1980) Nucl. Instrum. Methods , vol.171 , pp. 71
- Busch, F.¹ Pfeffer, W.² Kohlmeyer, B.³ Schüll, D.⁴ Pühlhoffer, F.⁵

18
- 0004035302
- M. Hult, H.J. Whitlow, and M. Östling Appl. Phys. Lett. 60 1992 219
- (1992) Appl. Phys. Lett. , vol.60 , pp. 219
- Hult, M.¹ Whitlow, H.J.² Östling, M.³

19
- 0034836812
- K. Arstila, T. Sajavaara, and J. Keinonen Nucl. Instrum. Methods B 174 2001 163
- (2001) Nucl. Instrum. Methods B , vol.174 , pp. 163
- Arstila, K.¹ Sajavaara, T.² Keinonen, J.³

20
- 65749096897
- S. Giangrandi, K. Arstila, B. Brijs, T. Sajavaara, A. Vantomme, and W. Vandervorst Nucl. Instrum. Methods B 267 2009 1936
- (2009) Nucl. Instrum. Methods B , vol.267 , pp. 1936
- Giangrandi, S.¹ Arstila, K.² Brijs, B.³ Sajavaara, T.⁴ Vantomme, A.⁵ Vandervorst, W.⁶

21
- 0004077682
- Report IPP 9/113, Max-Planck-Institut für Plasmaphysik Garching, Germany
- M. Mayer SIMNRA User's Guide, Report IPP 9/113 1997 Max-Planck-Institut für Plasmaphysik Garching, Germany
- (1997) SIMNRA User's Guide
- Mayer, M.¹

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