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Volumn 142, Issue 3, 1998, Pages 417-424

Time-of-flight spectrometry applied to 2 MeV He RBS

Author keywords

Diamond like carbon (DLC); Energy straggling; Rutherford backscattering; Time of flight spectrometer

Indexed keywords

DIAMOND FILMS; HELIUM; OXYGEN; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON;

EID: 0032121186     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00280-8     Document Type: Article
Times cited : (24)

References (5)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.