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Volumn 142, Issue 3, 1998, Pages 417-424
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Time-of-flight spectrometry applied to 2 MeV He RBS
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Author keywords
Diamond like carbon (DLC); Energy straggling; Rutherford backscattering; Time of flight spectrometer
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Indexed keywords
DIAMOND FILMS;
HELIUM;
OXYGEN;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SILICON;
ENERGY STRAGGLING;
FULL WIDTH AT HALF MAXIMUM (FWHM);
TANDEM EFFECTS;
PARTICLE DETECTORS;
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EID: 0032121186
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-583X(98)00280-8 Document Type: Article |
Times cited : (24)
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References (5)
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