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Journal of Materials Chemistry

Volumn 21, Issue 41, 2011, Pages 16488-16493

Iridium metal and iridium oxide thin films grown by atomic layer deposition at low temperatures

(6) Hämäläinen, Jani a Hatanpää, Timo a Puukilainen, Esa a Sajavaara, Timo b Ritala, Mikko a Leskelä, Markku a

a UNIVERSITY OF HELSINKI (Finland)

b UNIVERSITY OF JYVÄSKYLÄ (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; CRYSTALLINE-TO-AMORPHOUS; DENSITY REDUCTION; FOUR-POINT PROBE MEASUREMENTS; IRIDIUM OXIDES; LOW TEMPERATURES; OXYGEN-BASED PROCESS; PHASE CHANGE; XRD;

ATOMIC LAYER DEPOSITION; DEPOSITION; IRIDIUM; IRIDIUM COMPOUNDS; MOLECULAR OXYGEN; OZONE;

OXIDE FILMS;

EID: 80053985485 PISSN: 09599428 EISSN: 13645501 Source Type: Journal
DOI: 10.1039/c1jm12245b Document Type: Article

Times cited : (43)

References (22)

1
- 0004028474
- in, ed. H. S. Nalwa, Academic Press, San Diego, CA, 103-159
- M. Ritala and M. Leskelä, in Handbook of Thin Film Materials, ed., H. S. Nalwa, Academic Press, San Diego, CA, 2001, vol. 1, pp. 103-159
- (2001) Handbook of Thin Film Materials , vol.1
- Ritala, M.¹ Leskelä, M.²

2
- 21744444606
- R. L. Puurunen J. Appl. Phys. 2005 97 121301-1 121301-52
- (2005) J. Appl. Phys. , vol.97 , pp. 1213011-12130152
- Puurunen, R.L.¹

3
- 67349232387
- in, ed. A. C. Jones and M. L. Hitchman, The Royal Society of Chemistry, Cambridge, UK, 158-206
- M. Ritala and J. Niinistö, in Chemical Vapor Deposition: Precursors, Processes and Applications, ed., A. C. Jones, and, M. L. Hitchman, The Royal Society of Chemistry, Cambridge, UK, 2009, pp. 158-206
- (2009) Chemical Vapor Deposition: Precursors, Processes and Applications
- Ritala, M.¹ Niinistö, J.²

4
- 76549091893
- M. Ritala J. Niinistö ECS Trans. 2009 25 641 652
- (2009) ECS Trans. , vol.25 , pp. 641-652
- Ritala, M.¹ Niinistö, J.²

5
- 73449087352
- J. Vila-Comamala K. Jefimovs T. Pilvi M. Ritala S. S. Sarkar H. H. Solak V. A. Guzenko M. Stampanoni F. Marone J. Raabe G. Tzvetkov R. H. Fink D. Grolimund C. N. Borca B. Kaulich C. David J. Phys. Conf. Ser. 2009 186 012078-1 012078-3
- (2009) J. Phys. Conf. Ser. , vol.186 , pp. 0120781-0120783
- Vila-Comamala, J.¹ Jefimovs, K.² Pilvi, T.³ Ritala, M.⁴ Sarkar, S.S.⁵ Solak, H.H.⁶ Guzenko, V.A.⁷ Stampanoni, M.⁸ Marone, F.⁹ Raabe, J.¹⁰ Tzvetkov, G.¹¹ Fink, R.H.¹² Grolimund, D.¹³ Borca, C.N.¹⁴ Kaulich, B.¹⁵ David, C.¹⁶

6
- 80054009151
- PhD thesis, University of Helsinki, Finland
- T. Pilvi, PhD thesis, University of Helsinki, Finland, 2008, http://ethesis.helsinki.fi/en/
- (2008)
- Pilvi, T.¹

7
- 37749000911
- K. Jefimovs J. Vila-Comamala T. Pilvi J. Raabe M. Ritala C. David Phys. Rev. Lett. 2007 99 264801-1 264801-4
- (2007) Phys. Rev. Lett. , vol.99 , pp. 2648011-2648014
- Jefimovs, K.¹ Vila-Comamala, J.² Pilvi, T.³ Raabe, J.⁴ Ritala, M.⁵ David, C.⁶

8
- 33646066575
- K. Jefimovs J. Laukkanen T. Vallius T. Pilvi M. Ritala T. Meilahti M. Kaipiainen M. Bavdaz M. Leskelä J. Turunen Microelectron. Eng. 2006 83 1339 1342
- (2006) Microelectron. Eng. , vol.83 , pp. 1339-1342
- Jefimovs, K.¹ Laukkanen, J.² Vallius, T.³ Pilvi, T.⁴ Ritala, M.⁵ Meilahti, T.⁶ Kaipiainen, M.⁷ Bavdaz, M.⁸ Leskelä, M.⁹ Turunen, J.¹⁰

9
- 78650625062
- T. Ryynänen K. Nurminen J. Hämäläinen M. Leskelä J. Lekkala Proc. Eng. 2010 5 548 551
- (2010) Proc. Eng. , vol.5 , pp. 548-551
- Ryynänen, T.¹ Nurminen, K.² Hämäläinen, J.³ Leskelä, M.⁴ Lekkala, J.⁵

10
- 4344694233
- T. Aaltonen M. Ritala V. Sammelselg M. Leskelä J. Electrochem. Soc. 2004 151 G489 G492
- (2004) J. Electrochem. Soc. , vol.151
- Aaltonen, T.¹ Ritala, M.² Sammelselg, V.³ Leskelä, M.⁴

11
- 78149464171
- J. Hämäläinen T. Hatanpää E. Puukilainen L. Costelle T. Pilvi M. Ritala M. Leskelä J. Mater. Chem. 2010 20 7669 7675
- (2010) J. Mater. Chem. , vol.20 , pp. 7669-7675
- Hämäläinen, J.¹ Hatanpää, T.² Puukilainen, E.³ Costelle, L.⁴ Pilvi, T.⁵ Ritala, M.⁶ Leskelä, M.⁷

12
- 31844448110
- C. Dusarrat J. Gatineau Proc.-Electrochem. Soc. 2005 2005-05 354 359
- (2005) Proc.-Electrochem. Soc. , vol.2005 , pp. 354-359
- Dusarrat, C.¹ Gatineau, J.²

13
- 51849154394
- S.-W. Kim S.-H. Kwon S.-J. Jeong J.-S. Park S.-W. Kang Electrochem. Solid-State Lett. 2008 11 H303 H305
- (2008) Electrochem. Solid-State Lett. , vol.11
- Kim, S.-W.¹ Kwon, S.-H.² Jeong, S.-J.³ Park, J.-S.⁴ Kang, S.-W.⁵

14
- 63149198332
- S.-W. Kim S.-H. Kwon S.-W. Kang ECS Trans. 2008 16 309 314
- (2008) ECS Trans. , vol.16 , pp. 309-314
- Kim, S.-W.¹ Kwon, S.-H.² Kang, S.-W.³

15
- 33748871670
- K. Kim S. Lee J. Appl. Phys. 2006 100 051604-1 051604-11
- (2006) J. Appl. Phys. , vol.100 , pp. 0516041-05160411
- Kim, K.¹ Lee, S.²

16
- 33947655879
- S. Choi Y.-K. Cha B.-S. Seo S. Park J.-H. Park S. Shin K. S. Seol J.-B. Park Y.-S. Jung Y. Park Y. Park I.-K. Yoo S.-H. Choi J. Phys. D: Appl. Phys. 2007 40 1426 1429
- (2007) J. Phys. D: Appl. Phys. , vol.40 , pp. 1426-1429
- Choi, S.¹ Cha, Y.-K.² Seo, B.-S.³ Park, S.⁴ Park, J.-H.⁵ Shin, S.⁶ Seol, K.S.⁷ Park, J.-B.⁸ Jung, Y.-S.⁹ Park, Y.¹⁰ Park, Y.¹¹ Yoo, I.-K.¹² Choi, S.-H.¹³

17
- 38849197859
- S.-W. Kim S.-h. Kwon D.-K. Kwak S.-W. Kang J. Appl. Phys. 2008 103 023517-1 023517-6
- (2008) J. Appl. Phys. , vol.103 , pp. 0235171-0235176
- Kim, S.-W.¹ Kwak, D.-K.² Kang, S.-W.³

18
- 44349096238
- J. Hämäläinen M. Kemell F. Munnik U. Kreissig M. Ritala M. Leskelä Chem. Mater. 2008 20 2903 2907
- (2008) Chem. Mater. , vol.20 , pp. 2903-2907
- Hämäläinen, J.¹ Kemell, M.² Munnik, F.³ Kreissig, U.⁴ Ritala, M.⁵ Leskelä, M.⁶

19
- 70350263715
- J. Hämäläinen E. Puukilainen M. Kemell L. Costelle M. Ritala M. Leskelä Chem. Mater. 2009 21 4868 4872
- (2009) Chem. Mater. , vol.21 , pp. 4868-4872
- Hämäläinen, J.¹ Puukilainen, E.² Kemell, M.³ Costelle, L.⁴ Ritala, M.⁵ Leskelä, M.⁶

20
- 79958840947
- K. Knapas M. Ritala Chem. Mater. 2011 23 2766 2771
- (2011) Chem. Mater. , vol.23 , pp. 2766-2771
- Knapas, K.¹ Ritala, M.²

21
- 0042452079
- R. A. Waldo Microbeam Anal. 1988 23 310 314
- (1988) Microbeam Anal. , vol.23 , pp. 310-314
- Waldo, R.A.¹

22
- 24044546522
- M. Putkonen T. Sajavaara L. Niinistö J. Keinonen Anal. Bioanal. Chem. 2005 382 1791 1799
- (2005) Anal. Bioanal. Chem. , vol.382 , pp. 1791-1799
- Putkonen, M.¹ Sajavaara, T.² Niinistö, L.³ Keinonen, J.⁴

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