Metal-catalyzed electroless etching of silicon in aerated HF/H2O vapor for facile fabrication of silicon nanostructures

Nano Letters

Volumn 14, Issue 8, 2014, Pages 4212-4219

  Hu, Ya ^a   Peng, Kui Qing ^a   Qiao, Zhen ^a   Huang, Xing ^b   Zhang, Fu Qiang ^a   Sun, Rui Nan ^a   Meng, Xiang Min ^b   Lee, Shuit Tong ^c  

^a BEIJING NORMAL UNIVERSITY   (China)

^b TECHNICAL INSTITUTE OF PHYSICS AND CHEMISTRY   (China)

^c SOOCHOW UNIVERSITY   (China)

Author keywords

electrochemistry; galvanic etching; gas phase etching; Silicon nanowire

Indexed keywords

CATALYSIS; ELECTROCHEMISTRY; ETCHING; FABRICATION; NANOWIRES;

ENVIRONMENTAL FRIENDLINESS; FACILE FABRICATION; GALVANIC ETCHING; GAS PHASE ETCHING; METAL-CATALYZED ELECTROLESS ETCHINGS; SILICON NANO STRUCTURES; SILICON NANOWIRES; WATER CONSUMPTION;

SILICON;

EID: 84906094685     PISSN: 15306984     EISSN: 15306992     Source Type: Journal    
DOI: 10.1021/nl500361u     Document Type: Article

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