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Volumn 109, Issue , 2014, Pages 43-51

Properties of TiSiN coatings deposited by hybrid HiPIMS and pulsed-DC magnetron co-sputtering

(9) Arab Pour Yazdi, M a Lomello, F a,b Wang, J a,c,e Sanchette, F d Dong, Z c White, T c Wouters, Y e Schuster, F b Billard, A a

a UNIVERSITÉ DE TECHNOLOGIE DE BELFORT MONTBÉLIARD (France)

b CEA SACLAY (France)

c NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

d UTT (France)

e UNIV GRENOBLE ALPES (France)

Author keywords

Hybrid HiPIMS and PDCMS; Mechanical properties; Oxidation resistance; Silicon content; Thin films; TiSiN nanocomposites

Indexed keywords

COATINGS; DEPOSITION; HARDNESS; MAGNETRONS; MECHANICAL PROPERTIES; NANOCOMPOSITES; OXIDATION RESISTANCE; THIN FILMS; NANOCOMPOSITE FILMS;

BALL-ON-DISC TESTS; DEPOSITION PARAMETERS; HARDNESS DETERIORATION; HARDNESS/YOUNG'S MODULUS; HYBRID HIPIMS AND PDCMS; MAGNETRON CO-SPUTTERING; MICROSTRUCTURE AND MECHANICAL PROPERTIES; SILICON CONTENTS; HIPIMS AND PDCMS; HYBRID;

SILICON;

EID: 84903954079 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2014.06.023 Document Type: Article

Times cited : (53)

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