Influence of bias voltage on properties of AlCrN coatings prepared by cathodic arc deposition

Surface and Coatings Technology

Volumn 224, Issue , 2013, Pages 77-81

  Lomello, F ^a,b   Sanchette, F ^c   Schuster, F ^b   Tabarant, M ^b   Billard, A ^a  

^a UNIVERSITÉ DE TECHNOLOGIE DE BELFORT MONTBÉLIARD   (France)

^b CEA SACLAY   (France)

^c Institut Charles Delaunay   (France)

Author keywords

Aluminium chromium nitrides; Cathodic arc deposition; Hard coatings; Mechanical properties

Indexed keywords

CATHODIC ARC DEPOSITION; CHROMIUM NITRIDE; ENHANCED HARDNESS; GRAIN SIZE; LOW TEMPERATURES; UPSCALING; VACUUM CATHODIC ARC;

DEPOSITION; HARD COATINGS; MECHANICAL PROPERTIES; TRIBOLOGY;

BIAS VOLTAGE;

EID: 84876739997     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2013.02.051     Document Type: Article

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