CO2 gas sensing properties of DC reactive magnetron sputtered ZnO thin film

Ceramics International

Volumn 40, Issue 8 PART B, 2014, Pages 13115-13122

  Kannan, Padmanathan Karthick ^a   Saraswathi, Ramiah ^a   Rayappan, John Bosco Balaguru ^b  

^a MADURAI KAMARAJ UNIVERSITY   (India)

^b SASTRA UNIVERSITY   (India)

Author keywords

DC reactive magnetron sputtering; Thin film sensor; Zinc oxide

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL DETECTION; GAS DETECTORS; MAGNETRON SPUTTERING; MAGNETRONS; METALLIC FILMS; OPTICAL FILMS; SUBSTRATES; TEMPERATURE; THIN FILMS; ZINC OXIDE;

DC REACTIVE MAGNETRON SPUTTERING; GAS SENSING PROPERTIES; OPERATING TEMPERATURE; OPTICAL CHARACTERISTICS; RESPONSE AND RECOVERY TIME; RESPONSE CHARACTERISTIC; THIN FILM SENSORS; X RAY DIFFRACTOMETERS;

CARBON DIOXIDE;

EID: 84903889056     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2014.05.011     Document Type: Article

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