CO2 gas sensitivity of sputtered zinc oxide thin films

Bulletin of Materials Science

Volumn 30, Issue 2, 2007, Pages 113-116

  Samarasekara, P ^a   Yapa, N U S ^a   Kumara, N T R N ^a   Perera, M V K ^b  

^a UNIVERSITY OF RUHUNA   (Sri Lanka)

^b UNIVERSITY OF PERADENIYA   (Sri Lanka)

Author keywords

Gas sensitivity; Sputtering; Structure; Thin films; XRD patterns; ZnO

Indexed keywords

CARBON DIOXIDE; CHEMICAL SENSORS; DEPOSITION; SPUTTERING; ZINC OXIDE;

DEPOSITION TEMPERATURE; REACTIVE GASES; SUBSTRATE TEMPERATURE;

THIN FILMS;

EID: 34247599382     PISSN: 02504707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12034-007-0020-y     Document Type: Article

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