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Volumn 18, Issue 8, 2006, Pages 2417-2420
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Sputtered copper oxide (CuO) thin films for gas sensor devices
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL SENSORS;
COPPER OXIDES;
SPUTTERING;
SUBSTRATES;
X RAY DIFFRACTION;
GAS SENSITIVITY;
SPUTTERED COPPER OXIDE (CUO) THIN FILMS;
SUBSTRATE TEMPERATURE;
THIN FILMS;
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EID: 32544439081
PISSN: 09538984
EISSN: None
Source Type: Journal
DOI: 10.1088/0953-8984/18/8/007 Document Type: Article |
Times cited : (144)
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References (12)
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