High-rate pulsed reactive magnetron sputtering of oxide nanocomposite coatings

Vacuum

Volumn 87, Issue , 2013, Pages 96-102

  Musil, Jindrich ^a   Baroch, Pavel ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

Dual magnetron; Nanocomposite coatings; Oxidation resistance; Reactive magnetron sputtering; Thermal stability; Toughness

Indexed keywords

ALUMINUM; ALUMINUM COATINGS; DEPOSITION RATES; ELASTIC MODULI; INORGANIC COATINGS; MAGNETRON SPUTTERING; NANOCOMPOSITES; OXIDATION RESISTANCE; PROTECTIVE COATINGS; REACTIVE SPUTTERING; SPUTTERING; THERMODYNAMIC STABILITY; TOUGHNESS;

DUAL MAGNETRONS; EFFECTIVE YOUNG'S MODULUS; HIGH THERMAL STABILITY; NANO-COMPOSITE COATING; OPTICAL TRANSPARENCY; REACTIVE MAGNETRON SPUTTERING; RESISTANCE TO CRACKING; TRANSPARENT OXIDES;

HARD COATINGS;

EID: 84903491715     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2012.02.023     Document Type: Article

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