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Volumn 206, Issue 8-9, 2012, Pages 2105-2109
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Transparent Zr-Al-O oxide coatings with enhanced resistance to cracking
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Author keywords
DC pulsed reactive sputtering; Dual magnetron; Mechanical properties; Optical properties; Resistance to cracking; Two phase oxide
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Indexed keywords
DUAL MAGNETRON SPUTTERING;
DUAL MAGNETRONS;
ELASTIC RECOVERY;
HIGH DEPOSITION RATES;
HIGH HARDNESS;
OXIDE COATING;
OXIDE THIN FILMS;
RESISTANCE TO CRACKING;
TARGET POWER DENSITY;
TRANSITION MODES;
YOUNG'S MODULUS;
ALUMINUM;
DC POWER TRANSMISSION;
MECHANICAL PROPERTIES;
OPTICAL PROPERTIES;
PROTECTIVE COATINGS;
TRANSITION FLOW;
ZIRCONIUM;
OXIDE FILMS;
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EID: 84855262546
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2011.09.035 Document Type: Article |
Times cited : (59)
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References (19)
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