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Volumn 206, Issue 8-9, 2012, Pages 2105-2109

Transparent Zr-Al-O oxide coatings with enhanced resistance to cracking

Author keywords

DC pulsed reactive sputtering; Dual magnetron; Mechanical properties; Optical properties; Resistance to cracking; Two phase oxide

Indexed keywords

DUAL MAGNETRON SPUTTERING; DUAL MAGNETRONS; ELASTIC RECOVERY; HIGH DEPOSITION RATES; HIGH HARDNESS; OXIDE COATING; OXIDE THIN FILMS; RESISTANCE TO CRACKING; TARGET POWER DENSITY; TRANSITION MODES; YOUNG'S MODULUS;

EID: 84855262546     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2011.09.035     Document Type: Article
Times cited : (59)

References (19)
  • 6
    • 84855269583 scopus 로고
    • U.S. Patent No. 4 851 095, July 25
    • M.A. Scobey et al.: U.S. Patent No. 4 851 095, July 25, 1989.
    • (1989)
    • Scobey, M.A.1
  • 8
    • 84903490905 scopus 로고
    • The Chair of ISSP 2011 Committee, Kanazawa Institute of Technology, Japan, Tokyo
    • Hichwa B.P. Proc. of the 2nd International Symposium on ISSP 1993, 93:61. The Chair of ISSP 2011 Committee, Kanazawa Institute of Technology, Japan, Tokyo.
    • (1993) Proc. of the 2nd International Symposium on ISSP , vol.93 , pp. 61
    • Hichwa, B.P.1
  • 12
    • 84855286779 scopus 로고    scopus 로고
    • Deposition Sciences Inc., Santa Rosa, CA
    • Boling N., Wood B., Morand P. 2002, 1. Deposition Sciences Inc., Santa Rosa, CA.
    • (2002) , pp. 1
    • Boling, N.1    Wood, B.2    Morand, P.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.