Thermal stability of PVD hard coatings

Vacuum

Volumn 71, Issue 1-2 SPEC., 2003, Pages 279-284

  Mitterer, C ^a,b   Mayrhofer, P H ^a,b   Musil, J ^c  

^a UNIVERSITY OF LEOBEN   (Austria)

^b MATERIALS CENTER LEOBEN FORSCHUNG GMBH   (Austria)

^c UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

Hard coatings; Intrinsic stresses; Microstructure; Recovery; Recrystallization; Thermal stability

Indexed keywords

GRAIN SIZE AND SHAPE; MICROSTRUCTURE; PHYSICAL VAPOR DEPOSITION; STRESS ANALYSIS; THERMODYNAMIC STABILITY;

HARD COATINGS;

COATINGS;

EID: 0037427409     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00751-0     Document Type: Conference Paper

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