Tribological and mechanical properties of nanocrystalline-TiC/a-C nanocomposite thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 28, Issue 2, 2010, Pages 244-249

  Musil, J ^a,b   Novák, Petr ^a   Cerstv R ^a   Soukup, Z ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

^b INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS PHASE; COEFFICIENT OF FRICTIONS; NANOCOMPOSITE FILM; NANOCOMPOSITE THIN FILMS; NANOCRYSTALLINES; S RATIO; UNBALANCED MAGNETRON; WEAR COEFFICIENT; X-RAY STRUCTURE; YOUNG'S MODULUS;

AMORPHOUS FILMS; FRICTION; LOAD TESTING; MECHANICAL PROPERTIES; POISSON RATIO;

NANOCOMPOSITES;

EID: 77949354172     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3294717     Document Type: Article

References (59)

1. A. A. Voevodin, R. Bantle, and A. Matthews, Wear WEARCJ 0043-1648 185, 151 (1995). 10.1016/0043-1648(95)06603-9
2. J. M. Schneider, A. A. Voevodin, C. Rebholz, and A. Matthews, J. Vac. Sci. Technol. A JVTAD6 0734-2101 13, 2189 (1995). 10.1116/1.579541
3. A. A. Voevodin, S. V. Prasad, and J. S. Zabinski, J. Appl. Phys. JAPIAU 0021-8979 82, 855 (1997). 10.1063/1.365784
4. A. A. Voevodin and J. S. Zabinski, J. Mater. Sci. JMTSAS 0022-2461 33, 319 (1998). 10.1023/A:1004307426887
5. A. A. Voevodin, J. P. O. Neill, and J. S. Zabinski, Thin Solid Films THSFAP 0040-6090 342, 194 (1999). 10.1016/S0040-6090(98)01456-4
6. A. A. Voevodin and J. S. Zabinski, Thin Solid Films THSFAP 0040-6090 370, 223 (2000). 10.1016/S0040-6090(00)00917-2
7. A. Erdemir, O. L. Eryilmaz, and G. Fenske, J. Vac. Sci. Technol. A JVTAD6 0734-2101 18, 1987 (2000). 10.1116/1.582459
8. K. Bewilogua, C. V. Cooper, C. Specht, J. Schroder, R. Wittorf, and M. Grischke, Surf. Coat. Technol. SCTEEJ 0257-8972 127, 223 (2000). 10.1016/S0257-8972(00)00666-6
9. J. C. Damasceno, S. S. Camaro, Jr., F. L. Freire, Jr., and R. Carius, Surf. Coat. Technol. SCTEEJ 0257-8972 133-134, 247 (2000). 10.1016/S0257- 8972(00)00932-4
10. T. Zehnder and J. Pascheider, Surf. Coat. Technol. SCTEEJ 0257-8972 133-134, 138 (2000). 10.1016/S0257-8972(00)00888-4
11. B. K. Tay, Y. H. Cheng, X. Z. Ding, S. P. Lau, X. Shi, G. F. You, and D. Sheeja, Diamond Relat. Mater. DRMTE3 0925-9635 10, 1082 (2001). 10.1016/S0925-9635(00)00429-5
12. J. L. Endrino, J. J. Nainaparampil, and J. E. Krzanowski, Scr. Mater. SCMAF7 1359-6462 47, 613 (2002). 10.1016/S1359-6462(02)00236-1
13. M. Ban and T. Hasegawa, Surf. Coat. Technol. SCTEEJ 0257-8972 162, 1 (2003). 10.1016/S0257-8972(02)00572-8
14. D. Nilsson, F. Svahn, U. Wiklund, and S. Hogmark, Wear WEARCJ 0043-1648 254, 1084 (2003). 10.1016/S0043-1648(03)00340-5
15. A. A. Voevodin and J. S. Zabinski, in Nanostructured Thin Films and Nanodispersion Strengthened Coatings, edited by, A. A. Voevodin, D. V. Shtansky, E. A. Levashov, and, J. J. Moore, (Kluwer Academic, Dordrecht, 2004), Chap., pp. 1-8. 10.1007/1-4020-2222-0-1
16. S. Zhang, X. L. Bui, and Y. Fu, Thin Solid Films THSFAP 0040-6090 467, 261 (2004). 10.1016/j.tsf.2004.04.007
17. Y. Pauleau and F. Thiery, Surf. Coat. Technol. SCTEEJ 0257-8972 180-181, 313 (2004). 10.1016/j.surfcoat.2003.10.077
18. C. Corbella, E. Pascual, G. Oncins, C. Canal, J. L. Andujar, and E. Bertran, Thin Solid Films THSFAP 0040-6090 482, 293 (2005). 10.1016/j.tsf.2004. 11.178
19. C. Corbella, G. Oncins, M. A. Gomez, M. C. Polo, E. Pascual, J. Garcia-Cespedes, J. L. Andujar, and E. Bertran, Diamond Relat. Mater. DRMTE3 0925-9635 14, 1103 (2005). 10.1016/j.diamond.2004.10.029
20. A. A. Voevodin and J. S. Zabinski, Compos. Sci. Technol. CSTCEH 0266-3538 65, 741 (2005).
21. R. J. Narayan and D. Scholvin, J. Vac. Sci. Technol. B JVTBD9 1071-1023 23, 1041 (2005). 10.1116/1.1897712
22. Y. T. Pei, D. Galvan, J. Th. M. De Hosson, and A. Cavaleiro, Surf. Coat. Technol. SCTEEJ 0257-8972 198, 44 (2005). 10.1016/j.surfcoat.2004.10.106
23. Y. T. Pei, P. Huizenga, D. Galvan, and J. Th. M. De Hosson, J. Appl. Phys. JAPIAU 0021-8979 100, 114309 (2006). 10.1063/1.2396762
24. C. Donnet and A. Erdemir, in Materials Surface Processing by Directed Energy Techniques, edited by, Y. Pauleau, (Elsevier, Oxford, 2006), Chap., pp. 573-594. 10.1016/B978-008044496-3/50018-6
25. J. M. Anton, B. Mishra, J. J. Moore, J. A. Rees, and W. D. Sproul, Surf. Coat. Technol. SCTEEJ 0257-8972 201, 4131 (2006). 10.1016/j.surfcoat.2006.08.015
26. K. Baba, R. Hatada, and Y. Tanaka, Surf. Coat. Technol. SCTEEJ 0257-8972 201, 8362 (2007). 10.1016/j.surfcoat.2006.02.086
27. X. Wu, M. Suzuki, T. Ohana, and A. Tanaka, Diamond Relat. Mater. DRMTE3 0925-9635 17, 7 (2008). 10.1016/j.diamond.2007.09.007
28. W. J. Meng and B. A. Gilispie, J. Appl. Phys. JAPIAU 0021-8979 84, 4314 (1998). 10.1063/1.368650
29. W. J. Meng, R. C. Tittsworth, and L. E. Rehn, Thin Solid Films THSFAP 0040-6090 377-378, 222 (2000). 10.1016/S0040-6090(00)01300-6
30. H. Dimigen, H. Hubsch, and R. Memming, Appl. Phys. Lett. APPLAB 0003-6951 50, 1056 (1987). 10.1063/1.97968
31. Y. T. Pei, D. Galvan, and J. Th. M. De Hosson, Acta Mater. ACMAFD 1359-6454 53, 4505 (2005). 10.1016/j.actamat.2005.05.045
32. Y. T. Pei, D. Galvan, J. Th. M. De Hosson, and C. Strondl, J. Eur. Ceram. Soc. JECSER 0955-2219 26, 565 (2006). 10.1016/j.jeurceramsoc.2005.06.023
33. U. Wiklund, M. Nordin, O. Wanstrand, and M. Larsson, Surf. Coat. Technol. SCTEEJ 0257-8972 124, 154 (2000). 10.1016/S0257-8972(99)00627-1
34. M. Stüber, H. Leiste, S. Ulrich, H. Holleck, and D. Schild, Surf. Coat. Technol. SCTEEJ 0257-8972 150, 218 (2002). 10.1016/S0257-8972(01)01493-1
35. S. Zhang, X. L. Bui, and D. Sun, in Nanocomposite Thin Films and Coatings, edited by, S. Zhang, and, N. Ali, (Imperial College Press, London, 2007), Chap., pp. 111-164; S. Zhang, X. L. Bui, J. Jiang, and X. Li, Surf. Coat. Technol. SCTEEJ 0257-8972 198, 206 (2004). 10.1016/j.surfcoat.2004.10.041
36. J. L. Lin, B. Mishra, M. Pinkas, and J. J. Moore, Mater. Sci. Forum MSFOEP 0255-5476 561-565, 1177 (2007). 10.4028/www.scientific.net/MSF.561-565. 1177
37. N. G. Chechenin, P. N. Chernych, V. S. Kulikaukas, Y. Pei, D. Vainstein, and J. Th. M. de Hosson, Journal of Surface Investigation-X-ray Synchrotron and Neutron Techniques, 1, 674 (2007). 10.1134/S1027451007060092 0255-5476
38. K. Polychronopoulou, C. Rebholz, M. A. Baker, L. Theodorou, N. G. Demas, S. J. Hinder, A. A. Polycarpou, C. C. Doumanidis, K. Böbel, Diamond Relat. Mater. DRMTE3 0925-9635 17, 2054 (2008). 10.1016/j.diamond.2008.07.007
39. D. Martinez-Martinez, C. Lopez-Cartes, A. Fernandez, and J. C. Sanchez-Lopez, Surf. Coat. Technol. SCTEEJ 0257-8972 203, 756 (2008). 10.1016/j.surfcoat.2008.08.064
40. V. J. Benavides, C. D. Salazar, M. E. Espitia, D. M. Devia, and A. Devia, Phys. Scr. PHSTBO 0031-8949 T131, 014021 (2008). 10.1088/0031-8949/2008/T131/ 014021
41. Y. H. Wang, X. Zhang, X. Y. Wu, H. Zhang, and X. Zhang, Appl. Surf. Sci. ASUSEE 0169-4332 254, 5085 (2008). 10.1016/j.apsusc.2008.02.011
42. E. Lewin, Surf. Coat. Technol. SCTEEJ 0257-8972 202, 3563 (2008). 10.1016/j.surfcoat.2007.12.038
43. N. G. Chechenin, P. N. Chernych, V. S. Kulikauskas, Y. T. Pei, D. Vainshtein, and J. Th. M. De Hosson, J. Phys. D: Appl. Phys. JPAPBE 0022-3727 41, 085402 (2008). 10.1088/0022-3727/41/8/085402
44. Y. T. Pei, C. Q. Chen, K. P. Shaha, J. Th. M. De Hosson, J. W. Bradley, S. A. Voronin, and M. Cada, Acta Mater. ACMAFD 1359-6454 56, 696 (2008). 10.1016/j.actamat.2007.10.025
45. M. Lindquist, O. Wilhelmsson, U. Jansson, and U. Wiklund, Wear WEARCJ 0043-1648 266, 379 (2009). 10.1016/j.wear.2008.04.046
46. C. Corbella, E. Bertran, M. C. Polo, E. Pascual, and J. L. Andujar, Diamond Relat. Mater. DRMTE3 0925-9635 16, 1828 (2007). 10.1016/j.diamond.2007. 07.012
47. D. Martinez-Martinez, C. Lopez-Cartes, A. Fernandez, and J. C. Sanchez-Lopez, Thin Solid Films THSFAP 0040-6090 517, 1662 (2009). 10.1016/j.tsf.2008.09.091
48. J. Musil, M. Louda, Z. Soukup, and M. Kubasek, Diamond Relat. Mater. DRMTE3 0925-9635 17, 1905 (2008). 10.1016/j.diamond.2008.04.009
49. T. Y. Tsui, G. M. Pharr, W. C. Oliver, C. S. Bhatia, R. L. White, S. Anders, A. Anders, and I. G. Brown, Mater. Res. Soc. Symp. 383, 447 (1995).
50. A. Leyland and A. Matthews, Wear WEARCJ 0043-1648 246, 1 (2000). 10.1016/S0043-1648(00)00488-9
51. A. Leyland and A. Matthews, Surf. Coat. Technol. SCTEEJ 0257-8972 177-178, 317 (2004). 10.1016/j.surfcoat.2003.09.011
52. A. Leyland and A. Matthews, in Nanostructured Coatings, edited by, A. Cavaleiro, and, J. Th. M. De Hosson, (Springer, New York, 2006), Chap., pp. 511-538. 10.1007/978-0-387-48756-4-12
53. S. Neuville and A. Matthews, Thin Solid Films THSFAP 0040-6090 515, 6619 (2007). 10.1016/j.tsf.2007.02.011
54. A. Matthews and A. Leyland, Materials related aspects of nanostructured tribological coatings, SVC Bulletin, Spring, 2009, pp. 40-44.
55. J. Musil, F. Kunc, H. Zeman, and H. Polakova, Surf. Coat. Technol. SCTEEJ 0257-8972 154, 304 (2002). 10.1016/S0257-8972(01)01714-5
56. J. Musil and M. Jirout, Surf. Coat. Technol. SCTEEJ 0257-8972 201, 5148 (2007). 10.1016/j.surfcoat.2006.07.020
57. R. Wei, Surf. Coat. Technol. SCTEEJ 0257-8972 203, 538 (2008). 10.1016/j.surfcoat.2008.05.019
58. J. L. Grosseau-Poussard, P. Moine, and M. Brendle, Thin Solid Films THSFAP 0040-6090 307, 163 (1997). 10.1016/S0040-6090(97)00205-8
59. T. Polcar, M. Evarsto, R. Colaco, and C. Silviu Sandu, Acta Mater. ACMAFD 1359-6454 56, 5101 (2008). 10.1016/j.actamat.2008.06.029