Large-scale complementary macroelectronics using hybrid integration of carbon nanotubes and IGZO thin-film transistors

Nature Communications

Volumn 5, Issue , 2014, Pages

  Chen, Haitian ^a   Cao, Yu ^a   Zhang, Jialu ^a   Zhou, Chongwu ^a  

^a Ming Hsieh Department of Electrical Engineering University of Southern California ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBE; GALLIUM; INDIUM; POLYLYSINE; SILICON; ZINC OXIDE;

BIOFILM; CARBON; ELECTRONIC EQUIPMENT; OXIDE; SUBSTRATE;

ARTICLE; ELECTRONICS; FILM; HYBRID; INTEGRATED CIRCUIT; MACROELECTRONICS; NANOFABRICATION; OSCILLATION; OSCILLATOR; PARTICLE SIZE; SEMICONDUCTOR;

EID: 84902481760     PISSN: None     EISSN: 20411723     Source Type: Journal    
DOI: 10.1038/ncomms5097     Document Type: Article

References (67)

1. Reuss, R. H. et al. Macroelectronics: perspectives on technology and applications. Proc. IEEE 93, 1239-1256 (2005). (Pubitemid 41084571)
2. Wang, C, Takei, K., Takahashi, T. & Javey, A. Carbon nanotube electronics-moving forward. Chem. Soc. Rev. 42, 2592-2609 (2013).
3. Mei, J., Diao, Y., Appleton, A. L., Fang, L. & Bao, Z. Integrated materials design of organic semiconductors for field-effect transistors. J. Am. Chem. Soc. 135, 6724-6746 (2013).
4. Fortunato, E., Barquinha, P. & Martins, R. Oxide semiconductor thin-film transistors: a review of recent advances. Adv. Mater. 24, 2945-2986 (2012).
5. Sirringhaus, H. 25th anniversary article: organic field-effect transistors: the path beyond amorphous silicon. Adv. Mater. 26, 1319-1335 (2014).
6. Nielsen, C. B., Turbiez, M. & McCulloch, I. Recent advances in the development of semiconducting dpp-containing polymers for transistor applications. Adv. Mater. 25, 1859-1880 (2013).
7. Myny, K. et al. An 8-Bit, 40-Instructions-Per-Second Organic Microprocessor on Plastic Foil. IEEE J. Solid-State Circuits 47, 284-291 (2012).
8. Stingelin-Stutzmann, N. et al. Organic thin-film electronics from vitreous solution-processed rubrene hypereutectics. Nat. Mater. 4, 601-606 (2005). (Pubitemid 41092689)
9. Forrest, S. R. The path to ubiquitous and low-cost organic electronic appliances on plastic. Nature 428, 911-918 (2004). (Pubitemid 38568095)
10. Payne, M. M., Parkin, S. R., Anthony, J. E., Kuo, C.-C. & Jackson, T. N. Organic field-effect transistors from solution-deposited functionalized acenes with mobilities as high as 1cm/vs. J. Am. Chem. Soc. 127, 4986-4987 (2005). (Pubitemid 40523435)
11. Park, J. S., Maeng, W.-J., Kim, H.-S. & Park, J.-S. Review of recent developments in amorphous oxide semiconductor thin-film transistor devices. Thin Solid Films 520, 1679-1693 (2012).
12. Wager, J. F., Yeh, B., Hoffman, R. L. & Keszler, D. A. An amorphous oxide semiconductor thin-film transistor route to oxide electronics. Curr. Opin. Solid State Mater. Sci. http://dx.doi.org/10.1016/j.cossms.2013.07.002 (2013).
13. Kamiya, T., Nomura, K. & Hideo, H. Present status of amorphous In-Ga-Zn-O thin-film transistors. Sci. Technol. Adv. Mater. 11, 044305 (2010).
14. Jae Kyeong, J. The status and perspectives of metal oxide thin-film transistors for active matrix flexible displays. Semicond. Sci. Technol. 26, 034008 (2011).
15. Yabuta, H. et al. Sputtering formation of p-type SnO thin-film transistors on glass toward oxide complimentary circuits. Appl. Phys. Lett. 97, 072111-072113 (2010).
16. Zou, X. et al. Improved subthreshold swing and gate-bias stressing stability of p-type Cu2O thin-film transistors using a HfO2 high-k gate dielectric grown on a SiO2/Si Substrate by pulsed laser ablation. IEEE Trans. Electron Devices 58, 2003-2007 (2011).
17. Zhang, J. et al. Separated carbon nanotube macroelectronics for active matrix organic light-emitting diode displays. Nano Lett. 11, 4852-4858 (2011).
18. Zhang, J., Wang, C. & Zhou, C. Rigid/flexible transparent electronics based on separated carbon nanotube thin-film transistors and their application in display electronics. ACS Nano 6, 7412-7419 (2012).
19. Cao, Q. et al. Medium-scale carbon nanotube thin-film integrated circuits on flexible plastic substrates. Nature 454, 495-500 (2008).
20. Wang, C, Zhang, J. & Zhou, C. Macroelectronic integrated circuits using high-performance separated carbon nanotube thin-film transistors. ACS Nano 4, 7123-7132 (2010).
21. Sun, D.-M. et al. Flexible high-performance carbon nanotube integrated circuits. Nat. Nano 6, 156-161 (2011).
22. Gao, P., Zou, J., Li, H., Zhang, K. & Zhang, Q. Complementary logic gate arrays based on carbon nanotube network transistors. Small 9, 813-819 (2013).
23. Sun, D.-M. et al. Mouldable all-carbon integrated circuits. Nat. Commun. 4 (2013).
24. Snow, E. S., Novak, J. P., Campbell, P. M. & Park, D. Random networks of carbon nanotubes as an electronic material. Appl. Phys. Lett. 82, 2145-2147 (2003).
25. Ha, M. et al. Printed, sub-3V digital circuits on plastic from aqueous carbon nanotube inks. ACS Nano 4, 4388-4395 (2010).
26. Jinsoo, N. et al. Fully gravure-printed d flip-flop on plastic foils using single-walled carbon-nanotube-based TFTs. IEEE Electron Device Lett. 32, 638-640 (2011).
27. Jinsoo, N. et al. Fully gravure-printed flexible full adder using swnt-based tfts. IEEE Electron Device Lett. 33, 1574-1576 (2012).
28. Minhun, J. et al. All-printed and roll-to-roll-printable 13.56-mhz-operated 1-bit rf tag on plastic foils. IEEE Trans. Electron Device 57, 571-580 (2010).
29. Takahashi, T., Takei, K., Gillies, A. G., Fearing, R. S. & Javey, A. Carbon nanotube active-matrix backplanes for conformal electronics and sensors. Nano Lett. 11, 5408-5413 (2011).
30. Takahashi, T. et al. Carbon nanotube active-matrix backplanes for mechanically flexible visible light and X-ray imagers. Nano Lett. 13, 5425-5430 (2013).
31. Wang, C. et al. User-interactive electronic skin for instantaneous pressure visualization. Nat. Mater. 12, 899-904 (2013).
32. Yu, W. J., Chae, S. H., Lee, S. Y., Duong, D. L. & Lee, Y. H. Ultra-Transparent, flexible single-walled carbon nanotube non-volatile memory device with an oxygen-decorated graphene electrode. Adv. Mater. 23, 1889-1893 (2011).
33. Wang, C. et al. Wafer-scale fabrication of separated carbon nanotube thin-film transistors for display applications. Nano Lett. 9, 4285-4291 (2009).
34. Hu, L., Hecht, D. S. & Grüner, G. Percolation in Transparent and conducting carbon nanotube networks. Nano Lett. 4, 2513-2517 (2004). (Pubitemid 40002395)
35. Sangwan, V. K. et al. Fundamental Performance limits of carbon nanotube thin-film transistors achieved using hybrid molecular dielectrics. ACS Nano 6, 7480-7488 (2012).
36. Kim, S., Kim, S., Park, J., Ju, S. & Mohammadi, S. Fully transparent pixel circuits driven by random network carbon nanotube transistor circuitry. ACS Nano 4, 2994-2998 (2010).
37. Artukovic, E., Kaempgen, M., Hecht, D. S., Roth, S. & Grüner, G. Transparent and flexible carbon nanotube transistors. Nano Lett. 5, 757-760 (2005). (Pubitemid 40609755)
38. Miyata, Y. et al. Length-sorted semiconducting carbon nanotubes for high-mobility thin film transistors. Nano Res. 4, 963-970 (2011).
39. Cao, Q. et al. Highly bendable, transparent thin-film transistors that use carbon-nanotube-based conductors and semiconductors with elastomeric dielectrics. Adv. Mater. 18, 304-309 (2006). (Pubitemid 43213243)
40. Avouris, P. Molecular electronics with carbon nanotubes. Acc. Chem. Res. 35, 1026-1034 (2002).
41. Derycke, V., Martel, R., Appenzeller, J. & Avouris, P. Controlling doping and carrier injection in carbon nanotube transistors. Appl. Phys. Lett. 80, 2773-2775 (2002).
42. Zhou, C., Kong, J. & Dai, H. Electrical measurements of individual semiconducting single-walled carbon nanotubes of various diameters. Appl. Phys. Lett. 76, 1597-1599 (2000).
43. Liu, X., Lee, C., Zhou, C. & Han, J. Carbon nanotube field-effect inverters. Appl. Phys. Lett. 79, 3329-3331 (2001). (Pubitemid 33598739)
44. Ding, L. et al. CMOS-based carbon nanotube pass-transistor logic integrated circuits. Nat. Commun. 3, 677 (2012).
45. Wang, C., Ryu, K., Badmaev, A., Zhang, J. & Zhou, C. Metal contact engineering and registration-free fabrication of complementary metal-oxide semiconductor integrated circuits using aligned carbon nanotubes. ACS Nano 5, 1147-1153 (2011).
46. Zhang, J., Wang, C., Fu, Y., Che, Y. & Zhou, C. Air-stable conversion of separated carbon nanotube thin-film transistors from p-type to n-type using atomic layer deposition of high-k oxide and its application in cmos logic circuits. ACS Nano 5, 3284-3292 (2011).
47. Hai, W., Hong-Yu, C., Liyanage, L., Wong, H. S. P. & Mitra, S. in Electron Devices Meeting (IEDM), 2011 IEEE International 23-24 (Washington, DC, USA, 2011).
48. Shahrjerdi, D. et al. High-performance air-stable n-type carbon nanotube transistors with erbium contacts. ACS Nano 7, 8303-8308 (2013).
49. Suriyasena Liyanage, L., Xu, X., Pitner, G., Bao, Z. & Wong, H. S. P. VLSI-compatible carbon nanotube doping technique with low work-function metal oxides. Nano Lett. 14, 1884-1890 (2014).
50. Barquinha, P., Pereira, L., Gonçalves, G., Martins, R. & Fortunato, E. Toward high-performance amorphous GIZO TFTs. J. Electrochem. Soc. 156, H161-H168 (2009).
51. Jeong, J. K. et al. 3.1: distinguished paper: 12. 1-inch WXGA AMOLED display driven by indium-gallium-zinc oxide TFTs array. SID Symp. Dig. Tech. Pap. 39, 1-4 (2008).
52. Arnold, M. S., Green, A. A., Hulvat, J. F., Stupp, S. I. & Hersam, M. C. Sorting carbon nanotubes by electronic structure using density differentiation. Nat. Nano 1, 60-65 (2006).
53. Conley, J. F. Instabilities in amorphous oxide semiconductor thin-film transistors. IEEE Trans. Device Mater. Rel. 10, 460-475 (2010).
54. Hong, D. & Wager, J. F. Passivation of zinc-tin-oxide thin-film transistors. J. Vac. Sci. Technol. B 23, L25-L27 (2005). (Pubitemid 41788844)
55. Shulaker, M. et al. in Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2013 IEEE International 112-113 (San Francisco, CA, USA, 2013).
56. Chen, Z. et al. An integrated logic circuit assembled on a single carbon nanotube. Science 311, 1735-1735 (2006).
57. Cao, Q., Xia, M. G., Shim, M. & Rogers, J. A. Bilayer organic-inorganic gate dielectrics for high-performance, low-voltage, single-walled carbon nanotube thin-film transistors, complementary logic gates, and p-n diodes on plastic substrates. Adv. Funct. Mater. 16, 2355-2362 (2006). (Pubitemid 46026000)
58. Kang, S. J. et al. High-performance electronics using dense, perfectly aligned arrays of single-walled carbon nanotubes. Nat. Nano 2, 230-236 (2007). (Pubitemid 46739814)
59. Jie, Z. et al. Carbon nanotube robust digital VLSI. IEEE Trans. Comput.-Aided Design Integr. Circuits Syst. 31, 453-471 (2012).
60. Wang, C. et al. Extremely bendable, high-performance integrated circuits using semiconducting carbon nanotube networks for digital, analog, and radio-frequency applications. Nano Lett. 12, 1527-1533 (2012).
61. Kocabas, C. et al. Radio frequency analog electronics based on carbon nanotube transistors. Proc. Natl Acad. Sci. USA 105, 1405-1409 (2008). (Pubitemid 351346526)
62. Yu, W. J. et al. Adaptive logic circuits with doping-free ambipolar carbon nanotube transistors. Nano Lett. 9, 1401-1405 (2009).
63. Ding, L. et al. Carbon nanotube based ultra-low voltage integrated circuits: Scaling down to 0.4V. Appl. Phys. Lett. 100, 263116-263116-5 (2012).
64. Shulaker, M. M. et al. Carbon nanotube computer. Nature 501, 526-530 (2013).
65. Kang, S.-M. & Leblebici, Y. CMOS Digital Integrated Circuits Analysis and Design 3rd edn (McGraw-Hill Science/Engineering/Math, 2002).
66. Kim, G. H. et al. Inkjet-printed InGaZnO thin film transistor. Thin Solid Films 517, 4007-4010 (2009).
67. Ha, M. et al. Aerosol jet printed, low voltage, electrolyte gated carbon nanotube ring oscillators with sub-5ms stage delays. Nano Lett. 13, 954-960 (2013).