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Volumn 127, Issue , 2014, Pages 98-103

Investigation on growth behavior of multiphase silicon carbon film for front contact layer in a Si thin film solar cell

Author keywords

Contact layer; Multiphase silicon carbon; PECVD; Si thin film solar cell

Indexed keywords

AMORPHOUS CARBON; AMORPHOUS SILICON; CARBON FILMS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON CARBIDE; SOLAR CELLS; THIN FILMS;

EID: 84899794578     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2014.03.054     Document Type: Article
Times cited : (7)

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