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Materials Science and Engineering: B

Volumn 95, Issue 1, 2002, Pages 43-50

Multiphase structure of hydrogenated amorphous silicon carbide thin films

(3) Wang, Y H a,b Lin, J a Huan, C H A a

a NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

b INSTITUTE OF MICROELECTRONICS (Singapore)

Author keywords

Hydrogenated amorphous silicon carbide; Microstructure; Multiphase; PE CVD; Photoluminescence

Indexed keywords

AMORPHOUS SILICON; ATOMIC FORCE MICROSCOPY; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGENATION; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING; SILICON CARBIDE; TRANSMISSION ELECTRON MICROSCOPY; ULTRAVIOLET SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

MULTIPHASE STRUCTURES;

THIN FILMS;

EID: 0036641015 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(02)00204-0 Document Type: Article

Times cited : (51)

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