Large area Si thin film solar module applying n-μc-SiOx:H intermediate layer with low refractive index

Solar Energy Materials and Solar Cells

Volumn 113, Issue , 2013, Pages 79-84

  Hwang, Sun Tae ^a   You, Dong Joo ^a   Kim, Sun Ho ^a   Lee, Sungeun ^a   Lee, Heon Min ^a  

^a LG Electronics Inc   (South Korea)

Author keywords

Large area solar module; n c SiOx:H intermediate layer; Si thin film solar cell

Indexed keywords

A-SI:H; ABSORBING LAYERS; BOTTOM LAYERS; CONDUCTIVE ATOMIC FORCE MICROSCOPY; FILL FACTOR; INTERMEDIATE LAYERS; LARGE AREA MODULE; LARGE-AREA SUBSTRATES; LOW REFRACTIVE INDEX; OXYGEN REACTION; PROCESS CONDITION; SOLAR MODULE; THIN FILM SOLAR CELLS; TRIPLE JUNCTION; WORKING PRESSURES;

ATOMIC FORCE MICROSCOPY; CONVERSION EFFICIENCY; ELECTRODES; FLOW RATE; OPEN CIRCUIT VOLTAGE; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REACTION INTERMEDIATES; SILICON; THIN FILMS; VAPOR DEPOSITION;

REFRACTIVE INDEX;

EID: 84874680810     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2013.01.042     Document Type: Article

References (27)

1. A.V. Shah, H. Schade, M. Vanecek, J. Meier, E. Vallat-Sauvain, N. Wyrsch, U. Kroll, C. Droz, and J. Bailat Thin-film silicon solar cell technology Progress in Photovoltaics: Research and Applications 12 2004 113 142 (Pubitemid 38464403)
2. C.R. Wronski, B. Von Roedern, and A. Kolodziej Thin-film Si:H-based solar cells Vacuum 82 2008 1145 1150
3. M.A. Green, K. Emery, Y. Hishikawa, W. Warta, and E.D. Dunlop Solar cell efficiency tables (version 41) Progress in Photovoltaics: Research and Applications 21 2013 1 11
4. S.H. Kim, D.J. You, J.H. Park, S.E. Lee, H.-M. Lee, and D. Kim Front contact layer of multiphase silicon-carbon in thin film silicon solar cell Applied Physics Letters 101 2012 133910-1 133910-3
5. J. Yang, A. Banerjee, and S. Guha Triple-junction amorphous silicon alloy solar cell with 14.6% initial and 13.0% stable conversion efficiencies Applied Physics Letters 70 1997 2975 2977 (Pubitemid 127643719)
6. X. Deng, Optimization of a-SiGe based triple, tandem and single-junction solar cells, Conference Record of the Thirty-first IEEE Photovoltaic Specialists Conference, Orlando, 2005, pp. 1365-1370. (Pubitemid 41668037)
7. x:H layer leading to a >16% efficient multi-junction thin-film silicon solar cell Applied Physics Letters 99 2011 113512-1 113512-3
8. T. Sasaki, N. Kadota, M. Gotoh, K. Shimizu, T. Takahashi, T. Sawada, S. Fukuda, M. Yoshimi, K. Yamamoto, T. Nomura, A. Nakajima, Fabrication technology for thin film silicon hybrid solar cells and modules, Proceedings of the 35th IEEE Photovoltaic Specialists Conference, Honolulu, 2010, pp. 1134-1130.
9. K. Yamamoto, A. Nakajima, M. Yoshimi, T. Sawada, S. Fukuda, T. Suezaki, M. Ichikawa, Y. Koi, M. Goto, T. Meguro, T. Matsuda, M. Kondo, T. Sasaki, Y. Tawada, and A Thin-film Silicon solar cell and module Progress in Photovoltaics: Research and Applications 13 2005 489 494
10. J. Bailat, L. Fesquet, J.-B. Orhan, Y. Djeridane, B. Wolf, P. Madliger, J. Steinhauser, S. Benagli, D. Borrello, L. Castens, G. Monteduro, M. Marmelo, B. Dehbozorghi, E. Vallat-Sauvain, X. Multone, D. Romang, J.-F. Boucher, J. Meier, U. Kroll, M. Despeisse, G. Bugnon, C. Ballif, S. Marjanovic, G. Kohnke, N. Borrelli, K. Koch, J. Liu, R. Modavis, D. Thelen, S. Vallon, A. Zakharian, D. Weidman, Recent Developments of high-efficiency micromorph tandem solar cells in KAI-M PECVD reactors, in: Proceedings of the 25th European Photovoltaic Solar Energy Conference and the Fifth World Conference on Photovoltaic Energy Conversion, Valencia, 2010, pp. 2069-2073.
11. D. Fischer, S. Dubail, J.A.A. Selvan, N.P. Vaucher, R. Platz, Ch. Hof, U. Kroll,. Meier, P. Tomes, H. Keppner, N. Wyrsch, M. Goetz, A. Shah, K.-D. Ufert, The micromorph solar cell: extending a-Si:H technology towards thin film crystalline silicon, in: Conference Record of the 25th IEEE Photovoltaic Specialists Conference, Washington DC, 1996, pp. 1053-1056.
12. A. Lambertz, T. Grundler, and F. Finger Hydrogenated amorphous silicon oxide containing a microcrystalline silicon phase and usage as an intermediate reflector in thin-film silicon solar cells Journal of Applied Physics 109 2011 113109-1 113109-10
13. P. Buehlmann, J. Bailat, D. Domine, A. Billet, F. Meillaud, A. Feltrin, and C. Balif In situ silicon oxide based intermediate reflector for thin-film silicon micromorph solar cells Applied Physics Letters 91 2007 143505-1 143505-3
14. P.D. Veneri, L.V. Mercaldo, and I. Usatti Silicon oxide based n-doped layer for improved performance of thin film silicon solar cells Applied Physics Letters 97 2010 023512-1 023512-3
15. J. Muller, B. Rech, J. Springer, and M. Vanecek TCO and light trapping in silicon thin film solar cells Solar Energy 77 2004 917 930 (Pubitemid 39605899)
16. S.Y. Myong, K. Sriprapha, S. Miyajima, M. Konagai, and A. Yamada High efficiency protocrystalline silicon/microcrystalline silicon tandem cell with zinc oxide intermediate layer Applied Physics Letters 90 2007 263509-1 263509-3
17. J. Meier, J. Spitznagel, S. Fay, C. Bucher, U. Graf, U. Kroll, S. Dubail, A. Shah, Enhanced light-trapping for micromorph tandem solar cells by LP-CVD ZnO, in: Conference Record of the 29th IEEE Photovoltaic Specialists Conference, New Orleans, 2002, pp. 1118-1121.
18. P. Cuony, D.T.L. Alexander, L. Lofgren, M. Krumrey, M. Marending, M. Despeisse, C. Balif, Mixed phase silicon oxide layers for thin-film silicon solar cells, in: Materials Research Society Symposium Proceedings 1321 2011, A12-02.
19. 2)-plasma in RF glow discharge Solar Energy Materials and Solar Cells 63 2000 285 297
20. M. Despeisse, C. Battaglia, M. Boccard, G. Bugnon, M. Charriere, P. Cuony, S. Hanni, L. Lofgren, F. Meillaud, G. Parascandolo, T. Soderstrom, and C. Ballif Optimization of thin film silicon solar cells on highly textured substrates Physica Status Solidi A 208 2011 1863
21. J.A. Dean Lange's Handbook of Chemistry 15th ed. 1999 McGraw-Hill, Inc. pp. 4.41-4.52
22. B. deB Darwent Bond dissociation energies in simple molecules, NSRDS-NBS 31 1970 National Bureau of Standards Washington, DC p. 23
23. Y. Maemura, H. Fujiyama, T. Takagi, R. Hayashi, W. Futako, M. Kondo, and A. Matsuda Particle formation and a-Si:H film deposition in narrow-gap RF plasma CVD Thin Solid Films 345 1999 80 84
24. A.L. Baia Neto, A. Lambertz, R. Carius, and F. Finger Relationships between structure, spin density and electronic transport in 'solar-grade' microcrystalline silicon films Journal of Non-Crystalline Solids 299 2002 274 279 (Pubitemid 34473262)
25. Y. Nakano, S. Goya, T. Watanabe, N. Yamashita, and Y. Yonekura High-deposition-rate of microcrystalline silicon solar cell by using VHF PECVD Thin Solid Films 506 2006 33 37
26. M. Kondo Microcrystalline materials and cells deposited by RF glow discharge Solar Energy Materials and Solar Cells 78 2003 543 566
27. N. Wyrsch, A. Biller, G. Bugnon. M. Despeisse, A. Feltrin, F. Meillaud, G. Parascandolo, C. Ballif, Development of micromorph cells in large-area industrial reactor, in: Proceedings of the 24th European Photovoltaic Solar Energy Conference, Hamburg, 2009, pp. 2808-2811.