Mask-free fabrication of inverted-pyramid texture on single-crystalline Si wafer

Optics and Laser Technology

Volumn 63, Issue , 2014, Pages 120-124

  Yang, Bogeum ^a   Lee, Myeongkyu ^a  

^a Yonsei University   (South Korea)

Author keywords

Laser; Silicon; Texturing

Indexed keywords

CRYSTALLINE MATERIALS; ETCHING; LASERS; SILICON; SILICON WAFERS; SURFACES; TEXTURES; TEXTURING;

ETCHING RATE; EXPOSED TO; INTERFERENCE PATTERNS; INTERNAL MORPHOLOGY; LASER INDUCED MELTING; NANOSECOND PULSED LASER; SI WAFER; SINGLE-CRYSTALLINE;

LASER MATERIALS PROCESSING;

EID: 84899725353     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlastec.2014.04.009     Document Type: Article

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