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Volumn 32, Issue 3, 2014, Pages

Optical characteristics of nanocrystalline AlxGa1-xN thin films deposited by hollow cathode plasma-assisted atomic layer deposition

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMIC LAYER DEPOSITION; CATHODES; DEPOSITION; GALLIUM ALLOYS; GALLIUM NITRIDE; METALLIC FILMS; NEAR INFRARED SPECTROSCOPY; OPTICAL BAND GAPS; PULSED LASER DEPOSITION; REFRACTIVE INDEX; SPECTROSCOPIC ELLIPSOMETRY; THIN FILMS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; ZINC SULFIDE;

EID: 84897519091     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.4870381     Document Type: Article
Times cited : (13)

References (30)
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    • V. Yu. Davydov et al., Phys. Rev. B 65, 125203 (2002). 10.1103/PhysRevB.65.125203
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    • Davydov, V.Yu.1
  • 9
    • 84874285626 scopus 로고    scopus 로고
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    • I. Bryan et al., Appl. Phys. Lett. 102, 061602 (2013). 10.1063/1.4792694
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    • Bryan, I.1
  • 20
    • 84982143545 scopus 로고    scopus 로고
    • Overview of Variable Angle Spectroscopic Ellipsometry (VASE), Part I: Basic Theory and Typical Applications
    • Proc. SPIE Vol. CR72, edited by Ghanim A. Al-Jumaily
    • J. A. Woollam, B. Johs, C. M. Herzinger, J. Hilfiker, R. Synowicki, and C. L. Bungay, "Overview of Variable Angle Spectroscopic Ellipsometry (VASE), Part I: Basic Theory and Typical Applications," in Optical Metrology, Proc. SPIE Vol. CR72, edited by Ghanim A. Al-Jumaily (1999), p. 3-28.
    • (1999) Optical Metrology , pp. 3-28
    • Woollam, J.A.1    Johs, B.2    Herzinger, C.M.3    Hilfiker, J.4    Synowicki, R.5    Bungay, C.L.6
  • 21
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    • Aspnes, D.E.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.