Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques

Acta Materialia

Volumn 66, Issue , 2014, Pages 370-377

  Berdova, Maria ^a   Ylitalo, Tuomo ^b   Kassamakov, Ivan ^b   Heino, Jouni ^c   Törmä, Pekka T ^a   Kilpi, Lauri ^d   Ronkainen, Helena ^d   Koskinen, Jari ^a   Hæggström, Edward ^b   Franssila, Sami ^a  

^a AALTO UNIVERSITY   (Finland)

^b UNIVERSITY OF HELSINKI   (Finland)

^c HELSINKI INSTITUTE OF PHYSICS   (Finland)

^d VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Atomic layer deposition; Bulge testing; Mechanical properties; Shaft loading testing

Indexed keywords

ALUMINA; ALUMINUM OXIDE; ATOMIC LAYER DEPOSITION; CURVE FITTING; ELASTIC MODULI; ELECTROMECHANICAL DEVICES; MECHANICAL ACTUATORS; MECHANICAL PROPERTIES; MEMS; NANOSYSTEMS; OXIDE FILMS; RESIDUAL STRESSES; STRESS ANALYSIS; TENSILE STRENGTH; TITANIUM COMPOUNDS;

ATOMIC LAYER DEPOSITED; LOAD-DISPLACEMENT CURVE; LOADING TECHNIQUE; NANO-LAMINATES; SUSPENDED MEMBRANES; THIN MEMBRANE; ULTIMATE TENSILE STRENGTH; ULTIMATE TENSILE STRESS;

THIN FILMS;

EID: 84894904237     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2013.11.024     Document Type: Article

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