Tensile testing of insulating thin films; Humidity effect on tensile strength of SiO2 films

Sensors and Actuators, A: Physical

Volumn 82, Issue 1, 2000, Pages 286-290

  Tsuchiya, Toshiyuki ^a   Inoue, Atsuko ^a   Sakata, Jiro ^a  

^a Rd Management Section   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC HUMIDITY; FRACTURE TOUGHNESS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICA; TENSILE STRENGTH; TENSILE TESTING; THIN FILMS;

HUMIDITY EFFECT;

THERMAL INSULATING MATERIALS;

EID: 0033731036     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00363-5     Document Type: Article

References (6)

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