Organic-inorganic thin films from TiCl4 and 4-aminophenol precursors: A model case of ALD/MLD hybrid-material growth?

European Journal of Inorganic Chemistry

Volumn , Issue 6, 2014, Pages 968-974

  Sundberg, Pia ^a   Karppinen, Maarit ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

Atomic layer deposition; Molecular layer deposition; Organic inorganic hybrid composites; Thin films; Titanium

Indexed keywords

ATOMS; CHLORINE COMPOUNDS; FILM GROWTH; MOLECULES; ORGANIC-INORGANIC MATERIALS; REFRACTIVE INDEX; SURFACE REACTIONS; THIN FILMS; TITANIUM COMPOUNDS;

4-AMINOPHENOLS; ATOMIC-LAYER DEPOSITION; DEPOSITION CYCLES; INORGANIC THIN FILMS; MOLECULAR LAYER DEPOSITION; ORGANIC PRECURSOR; ORGANIC-INORGANIC HYBRID COMPOSITES; ORGANIC/INORGANIC; THIN-FILMS; TITANIA; HYBRIDS MATERIAL;

ATOMIC LAYER DEPOSITION;

EID: 84894469348     PISSN: 14341948     EISSN: 10990682     Source Type: Journal    
DOI: 10.1002/ejic.201301560     Document Type: Article

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