Investigations on the spatial resolution of autocollimator-based slope measuring profilers

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 710, Issue , 2013, Pages 42-47

  Siewert, F ^a   Buchheim, J ^a   Hoft T ^a   Zeschke, T ^a   Schindler, A ^b   Arnold, T ^b  

^a HAHN MEITNER INSTITUT   (Germany)

^b LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

LTP; Metrology; NOM; Synchrotron optics; X ray optics

Indexed keywords

IMAGE RESOLUTION; MEASUREMENTS; PLASMA JETS; X RAY OPTICS;

ATMOSPHERIC PLASMAS; INTERFEROMETER MEASUREMENT; MEASURING MACHINES; OPTICAL COMPONENTS; SAMPLE PREPARATION; SPATIAL RESOLUTION; SURFACE PROFILES; SYNCHROTRON OPTICS;

FIGHTER AIRCRAFT;

EID: 84891903386     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2012.10.130     Document Type: Article

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