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Volumn 18, Issue 15, 2010, Pages 15807-15819

Improving the lateral resolution of a multisensor profile measurement method by nonequidistant sensor spacing

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT MEASUREMENT; SENSORS;

EID: 77954946356     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.015807     Document Type: Article
Times cited : (14)

References (18)
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    • J. Flügge, R. Köning, and C. Weichen, "W. Häßler-Grohne, R. D. Geckeler, A. Wiegmann, M. Schulz, C. Elster and H. Bosse, "Development of a 1.5D reference comparator for position and straightness metrology on photomasks," Proc. SPIE 7122, 71222Y (2008), doi:10.1117/12.801251, http://link.aip.org/link/?PSI/7122/71222Y/1.
    • (2008) Proc. SPIE , vol.7122
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.