The effect of Ta doping in polycrystalline TiOx and the associated thin film transistor properties

Applied Physics Letters

Volumn 103, Issue 21, 2013, Pages

  Ok, Kyung Chul ^a   Park, Yoseb ^a   Chung, Kwun Bum ^b   Park, Jin Seong ^a  

^a Hanyang University   (South Korea)

^b Dankook University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS STATE; ANNEALING TEMPERATURES; CRYSTAL PHASE; CRYSTALLINE PHASE; ELECTRON DONORS; POLYCRYSTALLINE; TANTALUM (TA); TRANSISTOR PERFORMANCE;

AMORPHOUS MATERIALS; TANTALUM OXIDES; TITANIUM OXIDES;

THIN FILM TRANSISTORS;

EID: 84888405342     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4831783     Document Type: Article

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