The effect of boron doping on the morphology and growth rate of micron diamond powders synthesized by HFCVD method

Diamond and Related Materials

Volumn 40, Issue , 2013, Pages 82-88

  Zhang, Tao ^a   Wang, Liang ^a   Sun, Fanghong ^a   Shen, Bin ^a   Zhang, Zhiming ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Boron doping; Hot filament CVD; Morphology; Single crystal growth

Indexed keywords

BORON CONCENTRATIONS; BORON-DOPING; CUBO-OCTAHEDRAL MORPHOLOGY; DIAMOND POWDERS; HIGH SUBSTRATE TEMPERATURE; HOMOEPITAXIAL GROWTH; HOT FILAMENT CVD; TRIMETHYL BORATES;

ACETONE; BORON; GROWTH RATE; MORPHOLOGY; POWDERS; SEMICONDUCTOR DOPING; SILICON WAFERS; SINGLE CRYSTALS;

DIAMONDS;

EID: 84887310550     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2013.10.008     Document Type: Article

References (32)

1. C.M. Sung Brazed diamond grid: a revolutionary design for diamond saws Diamond Relat. Mater. 8 1999 1540 1543
2. S. Schwarz, C. Rottmair, J. Hirmke, S. Rosiwal, and R.F. Singer CVD-diamond single-crystal growth J. Cryst. Growth 271 2004 425 434
3. F. Silva, J. Achard, O. Brinza, X. Bonnin, K. Hassouni, A. Anthonis, K. De Corte, and J. Barjon High quality, large surface area, homoepitaxial MPACVD diamond growth Diamond Relat. Mater. 18 2009 683 697
4. I. Friel, S.L. Clewes, H.K. Dhillon, N. Perkins, D.J. Twitchen, and G.A. Scarsbrook Control of surface and bulk crystalline quality in single crystal diamond grown by chemical vapour deposition Diamond Relat. Mater. 18 2009 808 815
5. K. Yamazaki, K. Furuichi, I. Tsumura, and Y. Takagi The large-sized diamond single-crystal synthesis by hot filament CVD J. Cryst. Growth 310 2008 1019 1022
6. A. Stacey, I. Aharonovich, S. Prawer, and J.E. Butler Controlled synthesis of high quality micro/nano-diamonds by microwave plasma chemical vapor deposition Diamond Relat. Mater. 18 2009 51 55
7. H.K. Chung, and J.C. Sung The CVD growth of micro crystals of diamond Diamond Relat. Mater. 10 2001 1584 1587 (Pubitemid 32849606)
8. J. Hirmke, S. Schwarz, C. Rottmair, S.M. Rosiwal, and R.F. Singer Diamond single crystal growth in hot filament CVD Diamond Relat. Mater. 15 2006 536 541 (Pubitemid 43929350)
9. S. Matsumoto, and Y. Matsui Electron microscopic observation of diamond particles grown from the vapour phase J. Mater. Sci. 18 1983 1785 1793 (Pubitemid 13557251)
10. T. Zhang, X. Wang, B. Shen, F. Sun, and Z. Zhang The effect of deposition parameters on the morphology of micron diamond powders synthesized by HFCVD method J. Cryst. Growth 372 2013 49 56
11. R. Ramamurti, M. Becker, T. Schuelke, T.A. Grotjohn, D.K. Reinhard, and J. Asmussen Deposition of thick boron-doped homoepitaxial single crystal diamond by microwave plasma chemical vapor deposition Diamond Relat. Mater. 18 2009 704 706
12. N. Fujita, R. Jones, S. Oberg, and P.R. Briddon Theoretical investigation on the interaction of nitrogen with dislocations in single crystal CVD diamond Diamond Relat. Mater. 17 2008 123 126
13. J. Achard, A. Tallaire, R. Sussmann, F. Silva, and A. Gicquel The control of growth parameters in the synthesis of high-quality single crystalline diamond by CVD J. Cryst. Growth 284 2005 396 405 (Pubitemid 41406308)
14. I. Sakaguchi, M. Nishitani-Gamo, K.P. Loh, K. Yamamoto, H. Haneda, and T. Ando Effect of oxygen addition on boron incorporation on semiconductive diamond CVD Diamond Relat. Mater. 7 1998 1144 1147 (Pubitemid 128713958)
15. W.L. Wang, G. Sánchez, M.C. Polo, R.Q. Zhang, and J. Esteve Nucleation and initial growth of diamond by biased hot filament chemical vapour deposition Appl. Phys. A Mater. Sci. Process. 65 1997 241 249 (Pubitemid 127692340)
16. X.Z. Liao, R.J. Zhang, C.S. Lee, S.T. Lee, and Y.W. Lam The influence of boron doping on the structure and characteristics of diamond thin films Diamond Relat. Mater. 6 1997 521 525 (Pubitemid 127407257)
17. N. Tokuda, H. Umezawa, T. Saito, K. Yamabe, H. Okushi, and S. Yamasaki Surface roughening of diamond (001) films during homoepitaxial growth in heavy boron doping Diamond Relat. Mater. 16 2007 767 770 (Pubitemid 46552178)
18. J. Achard, F. Silva, R. Issaoui, O. Brinza, A. Tallaire, H. Schneider, K. Isoird, H. Ding, S. Kon, and M.A. Pinault Thick boron doped diamond single crystals for high power electronics Diamond Relat. Mater. 20 2011 145 152
19. L. Wang, X. Lei, B. Shen, F. Sun, and Z. Zhang Tribological properties and cutting performance of boron and silicon doped diamond films on Co-cemented tungsten carbide inserts Diamond Relat. Mater. 33 2013 54 62
20. H. Liu, and D.S. Dandy Studies on nucleation process in diamond CVD: an overview of recent developments Diamond Relat. Mater. 4 1995 1173 1188
21. A.L.D. Skury, G.S. Bobrovnitchii, and S.N. Monteiro A parametric relationship for synthesized diamond powder Diamond Relat. Mater. 15 2006 61 66 (Pubitemid 41814592)
22. 2O on high-rate homoepitaxial growth of CVD single crystal diamonds J. Cryst. Growth 351 2012 51 55
23. S.T. Lee, Z. Lin, and X. Jiang CVD diamond films: nucleation and growth Mater. Sci. Eng. R-Rep. 25 1999 123 154 (Pubitemid 129305385)
24. X. Wu, Z. Yu, Y. Gong, J. Wang, and M. Tian Diamond film growth on the Mo-Re alloy foil J. Cryst. Growth 314 2011 58 61
25. S. Prawer, and R.J. Nemanich Raman spectroscopy of diamond and doped diamond Philos. Trans. R. Soc. A Math. Phys. Eng. Sci. 362 2004 2537 2565 (Pubitemid 39508367)
26. V. Fisher, D. Gandini, S. Laufer, E. Blank, and C. Comninellis Preparation and characterization of Ti/Diamond electrodes Electrochim. Acta 44 1998 521 524 (Pubitemid 128420958)
27. J. Michler, Y.v. Kaenel, J. Stiegler, and E. Blank Complementary application of electron microscopy and micro-Raman spectroscopy for microstructure, stress, and bonding defect investigation of heteroepitaxial chemical vapor deposited diamond films J. Appl. Phys. 83 1998 187 197 (Pubitemid 128602109)
28. D. Pradhan, Y.C. Lee, C.W. Pao, W.F. Pong, and I.N. Lin Low temperature growth of ultrananocrystalline diamond film and its field emission properties Diamond Relat. Mater. 15 2006 2001 2005 (Pubitemid 44779219)
29. R. Ramamurti, M. Becker, T. Schuelke, T. Grotjohn, D. Reinhard, and J. Asmussen Synthesis of boron-doped homoepitaxial single crystal diamond by microwave plasma chemical vapor deposition Diamond Relat. Mater. 17 2008 1320 1323
30. E. Gheeraert, P. Gonon, A. Deneuville, L. Abello, and G. Lucazeau Effect of boron incorporation on the 'quality' of MPCVD diamond films Diamond Relat. Mater. 2 1993 742 745
31. V.D. Blank, M.S. Kuznetsov, S.A. Nosukhin, S.A. Terentiev, and V.N. Denisov The influence of crystallization temperature and boron concentration in growth environment on its distribution in growth sectors of type IIb diamond Diamond Relat. Mater. 16 2007 800 804 (Pubitemid 46552165)
32. R. Issaoui, J. Achard, A. Tallaire, F. Silva, A. Gicquel, R. Bisaro, B. Servet, G. Garry, and J. Barjon Evaluation of freestanding boron-doped diamond grown by chemical vapour deposition as substrates for vertical power electronic devices Appl. Phys. Lett. 100 2012 122109